Abstract: A new active optical Atomic Force Microscopy (AFM) probe integrating monolithically a semiconductor laser source, an AFM tip, and a photodetector into a robust, easy-to use single semiconductor chip to enable both conventional AFM measurements and optical imaging and spectroscopy at the nanoscale.
Type:
Grant
Filed:
January 8, 2016
Date of Patent:
November 1, 2016
Assignee:
ACTOPROBE, LLC
Inventors:
Alexander A. Ukhanov, Gennady A. Smolyakov