Abstract: A vacuum deposition apparatus comprising an enclosure adapted to receive a substrate to be treated and placed under a vacuum; at least one injector that generates a molecular beam of vapor of an organic material the injector comprising a conduit located inside the enclosure and traversing an injection wall of the enclosure to form an outer nozzle adapted in such a manner as to be hermetically connected in a detachable manner to an organic material supply, wherein the supply is a bottle whose neck is adapted to be introduced into the nozzle; an outer heating apparatus located on both sides of an injection wall and surrounding the bottle; an inner heating apparatus surrounding the conduit; and a regulatable valve permitting regulation of conductance of the injector in the enclosure.

Abstract: Epitaxy equipment including an epitaxy chamber under vacuum containing a substrate support and at least one cell under vacuum for evaporation of epitaxy material closed by a diaphragm having at least one opening and communicating with the epitaxy chamber by a connecting flange, and a mobile plate positioned opposite the diaphragm such that the distance of the plate from an exterior surface of the diaphragm is variable and has a section corresponding to a section of the diaphragm and a molecular beam is formed at the level of a zone surrounding the plate.