Abstract: [Object] The present invention provides a flaw rate control valve and a producing method of the flow rate control valve in which cross-linked PTFE having excellent abrasion resistance and capable of reducing a dust-generating amount is used only on a contact portion between a valve body and a valve seat. [Solving Means] According to a flow rate control valve 1 of the invention, a flow path-side body 10 and a valve body 40 are made of fluorine-based resin composed of PFA or PTFE, and an annular or circular seal member 81 made of cross-linked PTFE is joined to a valve body-side abutting portion 40a having a valve seat 13 against which the valve body 40 abuts and to a valve seat-side abutting portion 13a of the valve seat 13 against which the valve body 40 abuts.

Abstract: It is an object of the present invention to provide a constant-pressure valve having excellent flexibility of a diaphragm and capable or reducing generation of particles.

Abstract: [Object] It is an object of the present invention to provide a valve structure capable of fixing a first connecting port of a first valve box block and a second connecting port of a second valve box block to each other when the first valve box block, a first driving portion block, the second valve box block and a second driving portion block are fixed to each other by bolts. [Solving means] A first valve box bolt insertion hole 113 is formed in the first valve box block 110, a first driving portion bolt fixing hole 123 is formed in the first driving portion block 120, a second valve box bolt insertion hole 213 is formed in the second valve box block 210, and a second driving portion bolt fixing hole 223 is formed in the second driving portion block 220.

Abstract: [Object] A diaphragm can strongly be fixed to a flow path-side body by a diaphragm-holder, a thickness of the flow path-side body of an outer periphery of a diaphragm is thinned, and the flow path-side body is downsized. [Solving Means] A diaphragm-holder abutting surface 75 is formed between a diaphragm-holder inner peripheral side ring-shaped projection 73 and a diaphragm-holder outer peripheral side ring-shaped projection 74, a diaphragm-holder inner peripheral side end surface 73s is abutted against a first fixed portion piston-side end surface 63Ap, a diaphragm-holder inner peripheral side outer peripheral surface 73o is abutted against a second fixed portion inner peripheral surface 63Bi, a diaphragm-holder outer peripheral side inner peripheral surface 74i is abutted against a body-side projection outer peripheral surface 16o, and the diaphragm-holder abutting surface 75 is abutted against the second fixed portion piston-side end surface 63Bp and a body-side projection end surface 16s.

Abstract: [Object] The present invention provides a flaw rate control valve and a producing method of the flow rate control valve in which cross-linked PTFE having excellent abrasion resistance and capable of reducing a dust-generating amount is used only on a contact portion between a valve body and a valve seat. [Solving Means] According to a flow rate control valve 1 of the invention, a flow path-side body 10 and a valve body 40 are made of fluorine-based resin composed of PFA or PTFE, and an annular or circular seal member 81 made of cross-linked PTFE is joined to a valve body-side abutting portion 40a having a valve seat 13 against which the valve body 40 abuts and to a valve seat-side abutting portion 13a of the valve seat 13 against which the valve body 40 abuts.

Abstract: A liquid micrometer which includes: a liquid flow path which supplies liquid from a liquid supply device to a discharge nozzle; a flow rate sensor provided in the liquid flow path; a control valve provided in the liquid flow path between the liquid supply device and the flow rate sensor; a controller which controls the control valve such that a flow rate measured by the flow rate sensor becomes equal to a set value; a pressure sensor which measures pressure of the liquid injected from the discharge nozzle; and a calculating section which calculates the size of a work from the pressure measured by the pressure sensor in a state where the flow rate is maintained at the set value by the controller.

Abstract: [Object] It is an object of the present invention to provide a valve structure capable of fixing a first connecting port of a first valve box block and a second connecting port of a second valve box block to each other when the first valve box block, a first driving portion block, the second valve box block and a second driving portion block are fixed to each other by bolts. [Solving means] A first valve box bolt insertion hole 113 is formed in the first valve box block 110, a first driving portion bolt fixing hole 123 is formed in the first driving portion block 120, a second valve box bolt insertion hole 213 is formed in the second valve box block 210, and a second driving portion bolt fixing hole 223 is formed in the second driving portion block 220.

Abstract: A liquid micrometer of the present invention includes: a liquid flow path 30 which supplies liquid from liquid supply means 10 to a discharge nozzle 20; a flow rate sensor 40 provided in the liquid flow path 30; a control valve 50 provided in the liquid flow path 30 between the liquid supply means 10 and the flow rate sensor 40; a controller 60 which controls the control valve 50 such that a flow rate measured by the flow rate sensor 40 becomes equal to a set value; a pressure sensor 70 which measures pressure of the liquid injected from the discharge nozzle 20; and a calculating section 80 which calculates the size of a work A from the pressure measured by the pressure sensor 70 in a state where the flow rate is maintained at the set value by the controller.

Abstract: A diaphragm member includes a film-shaped diaphragm made of PFA and a valve body which is laser welded to a central hole portion of the diaphragm.

Abstract: A diaphragm member includes a film-shaped diaphragm made of PFA and a valve body which is laser welded to a central hole portion of the diaphragm.

Abstract: A flow control valve has a valve body part which has a pressure differential device part and a valve seat, a first diaphragm which defines first and second chambers, a second diaphragm which defines third and fourth chambers and is provided with a valve element, a first moving part which advances and retracts together with the first diaphragm, and a second moving part which advances and retracts together with the second diaphragm; the second chamber and the fourth chamber form between them a connecting chamber, an intermediate transmission member which transmits movements of the first and second moving parts to each other is arranged, and a pressure differential control valve element which advances and retracts with respect to the pressure differential opening part and a pressure differential control valve element advancing/retracting means for making the pressure differential control valve element advance and retract are provided, and a flow control system using the same.

Abstract: A flow control system able to realize stabilization of a flow rate of fluid at a high precision even in cases where pressure fluctuation of an outlet fluid of the flow control system occurs, that is, a flow control system arranged in a supply line of fluid running from a fluid supply part to a predetermined fluid usage part, provided with a first pressure control valve part arranged on the fluid supply part side and a second pressure control valve part arranged on the fluid usage part side through the first pressure control valve part and a pressure loss part, the first pressure control valve part provided with a first pressure control mechanism maintaining the outlet fluid at a predetermined pressure by a first valve part arranged within a first valve chamber moving back and forth with respect to a first valve seat in accordance with pressure fluctuation of the inlet fluid, the second pressure control valve part provided with a second pressure control mechanism maintaining the inlet fluid at a predetermined

Abstract: A manifold valve has an intake for receiving a secondary fluid, a passage upwardly extending from the intake, a valve unit for opening and closing a top end of the passage, and a main channel having an opening on a bottom wall thereof, the opening facing the top end of the passage. The secondary fluid is upwardly supplied into the main channel through the intake, passage, and opening when the valve unit opens the top end of the passage and is stopped when the valve unit closes the top end of the passage.