Abstract: Provided are a composite tuned structure of optical, electrical, and/or magnetic circuit and a tuning method thereof. The composite tuned structure of optical, electrical, and/or magnetic circuit includes a first tuned optical electromagnetic circuit layer, a second tuned circuit layer, and an optical electromagnetic circuit matching layer, where stacked tuning is performed on the first and second tuned circuit layers to form the optical electromagnetic circuit matching layer; an initial aligned state is obtained based on the optical electromagnetic circuit matching layer, and a target aligned state is preset; and if the initial aligned state of the optical electromagnetic circuit matching layer is the same as the target aligned state, matching between the first tuned optical electromagnetic circuit layer and the second tuned circuit layer is compliant, otherwise, the matching is not compliant. The present disclosure designs the tuned optical electromagnetic circuit as a composite layer.