Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Type:
Grant
Filed:
June 7, 1995
Date of Patent:
January 27, 1998
Assignee:
Advanced Delivery & Chemical Systems, Inc.
Inventors:
Stephen H. Siegele, Craig M. Noah, John N. Gregg
Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Type:
Grant
Filed:
November 28, 1994
Date of Patent:
March 4, 1997
Assignee:
Advanced Delivery & Chemical Systems, Inc.
Inventors:
Stephen H. Siegele, Craig M. Noah, John N. Gregg
Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Type:
Grant
Filed:
June 7, 1995
Date of Patent:
January 7, 1997
Assignee:
Advanced Delivery & Chemical Systems, Inc.
Inventors:
Stephen H. Siegele, Craig M. Noah, John N. Gregg
Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Type:
Grant
Filed:
June 7, 1995
Date of Patent:
October 8, 1996
Assignee:
Advanced Delivery & Chemical Systems, Inc.
Inventors:
Stephen H. Siegele, Craig M. Noah, John N. Gregg
Abstract: A highly reliable bulk chemical refill system for high purity chemicals is provided. The system employs at least one metallic level sensor in a refillable ampule. The refillable ampule of the present invention comprises a metallic level sensor for sensing a high level or full level in the ampule. The metallic level sensor transmits this signal to a control unit that automatically stops the refilling process. Additionally the refillable ampule includes a low level sensor that either provides an automatic signal for starting the refilling process or an audible or visual alarm to alert an operator that the container is empty and requires refilling. At the same time, the low level sensor sends a signal to the processing equipment indicating the empty state of the ampule.
Type:
Grant
Filed:
April 28, 1993
Date of Patent:
November 14, 1995
Assignee:
Advanced Delivery & Chemical Systems, Inc.
Inventors:
Stephen H. Siegele, Craig M. Noah, John N. Gregg