Abstract: A bubbler assembly includes a quartz container formed with an indented bottom which defines a concave pocket to impart strength to the container. The pocket is filled with a heat conductive epoxy in order to improve the heat transfer characteristics of the bottom of the container.
Type:
Grant
Filed:
May 22, 1989
Date of Patent:
April 10, 1990
Assignee:
Advanced Delivery & Chemical Systems Incorporated