Abstract: This invention concerns a stable composition useful in the manufacture of semiconductors, comprising a liquid mixture of: octomethylcylcotetrasilane and a triethoxy arsenic compound.

Abstract: A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.

Abstract: This invention concerns a shipping crate, comprising: a base having three sides and one or more doors attached thereto, wheels attached to the base, a top attached to the sides having a tank hole, wherein the base, sides, and doors have been attached to provide a sealed compartment. This invention also concerns a chemical delivery cabinet, comprising: a base, three sides, and one or more doors attached to one or more sides, a valve manifold affixed to an inner wall of the cabinet, process control instrumentation which connects to and controls the valve manifold, wherein at least one of the doors has a touch control pad mounted thereon.

Abstract: This invention concerns a cabinet for chemical canister storage and dispensing. More particularly, this invention concerns a cabinet structure comprising: walls connected to a base and a top to provide an enclosed structure; wherein at least one wall has at least one vent opening on the lower portion thereof; wherein an upper portion of the cabinet has a exhaust outlet hole; wherein one or more baffles are positioned within the cabinet structure to direct a flow of air over fittings of a canister, a cabinet manifold, or both as the air moves from the at least one vent opening to the exhaust outlet hole.

Abstract: A bulk chemical delivery system having: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. The bulk chemical canister may have a capacity of 200 liters.

Abstract: This invention concerns a manifold for use in refill of canister containing chemicals. The manifold may comprise a vacuum supply valve; a vacuum generator; a pressure vent valve; a gas inlet valve; a bypass valve; an isolation valve; a control valve; a canister inlet valve; a canister outlet valve; a canister inlet coupler, and a canister outlet coupler. In the manifold the vacuum supply valve may be connected to the vacuum generator; the vacuum generator may be connected to the pressure vent valve and the control valve; the gas inlet valve may be connected to pressure vent valve and bypass valve; the bypass valve may be further connected to the isolation valve and the canister inlet valve; the isolation valve may also be connected to the canister outlet valve. In addition, the canister inlet valve may be connected to control valve, the canister inlet coupler, and the canister outlet valve; and the canister outlet valve may be further connected to the canister inlet coupler and the canister outlet coupler.

Abstract: Containers for ultrahigh purity chemicals having aspect ratios of greater than 3:1 and methods of making the same from seamless electropolished stainless steel tubing are described. Chemical delivery systems for semiconductor fabrication processes that utilize these high aspect ratio containers also are described.

Abstract: This invention concerns a shipping and containment cart, comprising: a base having three sides and one or more doors attached thereto, wheels attached to the base, a top attached to the sides having a tank hole, wherein the base, sides, and doors have been attached to provide a sealed compartment. This invention also concerns a chemical delivery cabinet, comprising: a base, three sides, and one or more doors attached to one or more sides, a valve manifold affixed to an inner wall of the cabinet, process control instrumentation which connects to and controls the valve manifold, wherein at least one of the doors has a touch control pad mounted thereon.

Abstract: This invention concerns a stable composition useful in the manufacture of semiconductors, comprising a liquid mixture of: tetraethylorthosilicate ("TEOS"), triethylborate ("TEB"), and a triethylphosphorus compound such as triethylphosphate ("TEPO"). The composition may be advantageously used in a plasma enhanced chemical vapor deposition apparatus equipped with a liquid mass flow controller. The boron and phosphorus percentages in the resulting borophosphosilicate film may be varied to arrive at desired percentages. This invention also includes a method useful for the preparation of a high purity liquid mixture useful in the manufacture of semiconductors, comprising the steps of: obtaining high purity (a) tetraethylorthosilicate, (b) triethylborate, and (c) a triethylphosphorus compound; adding components (a), (b), and (c) to a sealed, stainless steel container; and mixing the components to form the liquid mixture.

Abstract: A bracket assembly is provided for supporting and stabilizing valves or other accessories that are attached to chemical canisters. Such valves and related connectors are subject to damage and resulting leakage due to forces applied to them during shipment, handling, installation and use. In order to reduce such damage, a rigid baseplate is provided that can be attached to the port tube of a standard canister. Rigid angle brackets may be connected to the baseplate and to the valves to provide a strong, rigid support to hold the valves position relative to the canister. Such a bracket assembly removes stresses from conduits and sealed couplings between the valves and the canister, thus preventing damage to the couplings due to the application of external forces to the valves. The invention is also applicable to support other sorts of accessories mounted on canisters of various types and sizes.

Abstract: This invention concerns a manifold for use in refill of canister containing chemicals. The manifold may comprise a vacuum supply valve; a vacuum generator; a pressure vent valve; a gas inlet valve; a bypass valve; an isolation valve; a control valve; a canister inlet valve; a canister outlet valve; a canister inlet coupler; and a canister outlet coupler. In the manifold the vacuum supply valve may be connected to the vacuum generator; the vacuum generator may be connected to the pressure vent valve and the control valve; the gas inlet valve may be connected to pressure vent valve and bypass valve; the bypass valve may be further connected to the isolation valve and the canister inlet valve; the isolation valve may also be connected to the canister outlet valve. In addition, the canister inlet valve may be connected to control valve, the canister inlet coupler, and the canister outlet valve; and the canister outlet valve may be further connected to the canister inlet coupler and the canister outlet coupler.

Abstract: A bulk chemical delivery system, having a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. The bulk chemical canister may have a capacity of 200 liters. The bulk canister is housed within a transportation and containment cart that is housed within a cabinet.

Abstract: Silane compounds are described having the formula:Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.cwherein:R.sup.1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated;R.sup.2 is --CH.sub.2 F, --CHF.sub.2 or --CF.sub.3 ;a is 1, 2 or 3;b is 1 or 2;c is 0, 1 or 2; andwherein a+b+c equals 4. Methods of making and using these silane compounds in integrated circuit fabrication processes also are described.