Abstract: An enhancement-mode n-type field effect transistor is disclosed to have a metal oxide channel layer, a gate dielectric layer, a gate electrode, a source electrode, and a drain electrode. The metal oxide channel layer has a material selected from SnO2, ITO, ZnO, SnO2 and In2O3. The metal oxide channel layer has a thickness less than a threshold value to exhibit pinch-off behavior in transfer characteristics and has a mobility trend without saturation under positive operational voltage.