Patents Assigned to Advanced Display Process Engineering Co., Ltd.
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Patent number: 8821642Abstract: Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.Type: GrantFiled: November 26, 2008Date of Patent: September 2, 2014Assignee: Advanced Display Process Engineering Co., Ltd.Inventors: Young Jong Lee, Jun Young Choi, Saeng Hyun Jo, Hyun Hwan Ahn, Suk-Min Son, Sung Il Ahn
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Patent number: 8758516Abstract: Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.Type: GrantFiled: November 26, 2008Date of Patent: June 24, 2014Assignee: Advanced Display Process Engineering Co., Ltd.Inventors: Young Jong Lee, Jun Young Choi, Saeng Hyun Jo, Hyun Hwan Ahn, Suk-Min Son, Sung Il Ahn
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Patent number: 8623173Abstract: An electrode member for generating plasma includes an electrode plate and a cooling unit having a plurality of thermoelectric modules that are thermally in contact with the electrode plate. The thermoelectric modules may regulate the temperature of the electrode plate based on the Peltier effect.Type: GrantFiled: June 26, 2008Date of Patent: January 7, 2014Assignee: Advanced Display Process Engineering Co., Ltd.Inventor: Hyoung-Kyu Son
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Patent number: 8506711Abstract: An flat-panel display (FPD) manufacturing apparatus is provided. The apparatus is flexibly configured so that it is capable of easily processing large-size substrates while also simplifying manufacturing, transporting, operating, and repair processes.Type: GrantFiled: January 23, 2009Date of Patent: August 13, 2013Assignee: Advanced Display Process Engineering Co., Ltd.Inventors: Young Jong Lee, Jun Young Choi, Saeng Hyun Jo, Byung-Oh Yoon, Gyeong-Hoon Kim, Hong-Gi Jeong
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Patent number: 8361267Abstract: An adhesive chuck, and an apparatus and method for assembling substrates using the same are disclosed. The apparatus comprises a chamber, a first adhesive chuck inside the chamber and having a plurality of adhesive protrusions to adhere to a first substrate conveyed from an outside into the chamber via an intermolecular attractive force, and a driving unit to move the first substrate adhered to the first adhesive chuck and a second substrate toward each other to be compressed and assembled to each other. The apparatus can achieve adhesion and separation of a substrate with minimal power consumption, enhancing an to operating efficiency. Additionally, the adhesive chuck can overcome a problem of spot generation on a display panel caused by remaining static electricity. Furthermore, since the adhesive chuck is almost free from a problem of electric instability, it can exhibit high stability and efficiency and can be fabricated at lower costs.Type: GrantFiled: February 25, 2011Date of Patent: January 29, 2013Assignee: Advanced Display Process Engineering Co., Ltd.Inventor: Seok-Hee Shim
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Patent number: 8349082Abstract: Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.Type: GrantFiled: October 14, 2009Date of Patent: January 8, 2013Assignee: Advanced Display Process Engineering Co., Ltd.Inventors: Young Jong Lee, Jun Young Choi, Hyoung-Kyu Son, Jeong-Bin Lee, Gyeong-Hoon Kim, Hyung-Soo Kim, Myung-Woo Han
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Patent number: 8273211Abstract: Disclosed herein is a flat panel display manufacturing apparatus in a predetermined process is performed using plasma generated therein. In such a flat panel display manufacturing apparatus, a process gas is supplied into a chamber in an evenly diffused state to generate even plasma inside a symmetrical interior space of the chamber. Consequently, the flat panel display manufacturing apparatus can appropriately control flow rate of the plasma, thereby being capable of performing even processing on a large-scale substrate. In the flat panel display manufacturing apparatus, a substrate pedestal thereof is provided with a combination of vertical and horizontal shielding members, thereby being entirely protected from attack of the plasma, resulting in an increased life-span.Type: GrantFiled: October 7, 2008Date of Patent: September 25, 2012Assignee: Advanced Display Process Engineering Co., Ltd.Inventors: Gwang Ho Hur, Jun Young Choi, Cheol Won Lee, Hyun Hwan Ahn, Young Joo Hwang, Chun Sik Kim
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Patent number: 8272826Abstract: A substrate processing apparatus includes first and second transfer chambers, first and second load lock chambers for exchanging one or more substrates with respective ones of first and the second transfer chambers, and a substrate transfer unit, located between the first and second load lock chambers, for transferring the one or more substrates to the first and second load lock chambers.Type: GrantFiled: June 24, 2008Date of Patent: September 25, 2012Assignee: Advanced Display Process Engineering Co., LtdInventors: Cheol Rae Jo, Jang-Wan Park, Won Ki Jeong
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Patent number: 8245751Abstract: A substrate bonding apparatus and method are provided. The substrate bonding apparatus may include a board having a receiving surface opposite to a substrate fixed at one side thereof, a plurality of chucking members located between the receiving surface of the board and the substrate, and a substrate separation device to separate the substrate from the chucking members. The substrate separation device includes a pusher for pushing the substrate to separate the substrate from the chucking members, and a base plate installed at the receiving surface of the board, the base plate having an installation space to install the pusher formed therein. The pusher protrudes out of the base plate through an inlet and outlet port located at one end of the installation space to pressurize the substrate.Type: GrantFiled: October 29, 2008Date of Patent: August 21, 2012Assignee: Advanced Display Process Engineering Co., Ltd.Inventor: Jae Seok Hwang
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Patent number: 8205653Abstract: A substrate bonding apparatus and method are provided. The substrate bonding apparatus may include a first support member that receives a first substrate, a second support member that receives a second substrate opposite the first support member, and a support pin located at the outside of the first substrate fixed to the first support member. The support pin may be connected to the first support member, and a distance adjustment device may move the support pin upward or downward to adjust the distance between the first support member and the second support member.Type: GrantFiled: October 29, 2008Date of Patent: June 26, 2012Assignee: Advanced Display Process Engineering, Co., Ltd.Inventors: Dong Gun Kim, Bong Hwan Choi
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Patent number: 8187384Abstract: Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.Type: GrantFiled: October 14, 2009Date of Patent: May 29, 2012Assignee: Advanced Display Process Engineering Co. Ltd.Inventors: Young Jong Lee, Jun Young Choi, Hyoung-Kyu Son, Jeong-Bin Lee, Gyeong-Hoon Kim, Hyung-Soo Kim, Myung-Woo Han
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Patent number: 8152926Abstract: Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.Type: GrantFiled: October 14, 2009Date of Patent: April 10, 2012Assignee: Advanced Display Process Engineering Co. Ltd.Inventors: Young Jong Lee, Jun Young Choi, Hyoung-Kyu Son, Jeong-Bin Lee, Gyeong-Hoon Kim, Hyung-Soo Kim, Myung-Woo Han
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Patent number: 8087652Abstract: A substrate supporting apparatus includes first and second shafts spaced by a distance that corresponds to or exceeds a width of a substrate, and at least one wire to support the substrate. The wire has ends coupled to respective ones of the first and second shafts. The wire is raised and lowered to place a substrate onto a lower electrode in a substrate processing chamber and to remove the substrate when processing is completed.Type: GrantFiled: August 8, 2008Date of Patent: January 3, 2012Assignee: Advanced Display Process Engineering Co., LtdInventor: Suk Min Son
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Patent number: 8075691Abstract: Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.Type: GrantFiled: October 14, 2009Date of Patent: December 13, 2011Assignee: Advanced Display Process Engineering Co. Ltd.Inventors: Young Jong Lee, Jun Young Choi, Hyoung-Kyu Son, Jeong-Bin Lee, Gyeong-Hoon Kim, Hyung-Soo Kim, Myung-Woo Han
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Patent number: 7921895Abstract: An adhesive chuck, and an apparatus and method for assembling substrates using the same are disclosed. The apparatus comprises a chamber, a first adhesive chuck inside the chamber and having a plurality of adhesive protrusions to adhere to a first substrate conveyed from an outside into the chamber via an intermolecular attractive force, and a driving unit to move the first substrate adhered to the first adhesive chuck and a second substrate toward each other to be compressed and assembled to each other. The apparatus can achieve adhesion and separation of a substrate with minimal power consumption, enhancing an operating efficiency. Additionally, the adhesive chuck can overcome a problem of spot generation on a display panel caused by remaining static electricity. Furthermore, since the adhesive chuck is almost free from a problem of electric instability, it can exhibit high stability and efficiency and can be fabricated at lower costs.Type: GrantFiled: May 25, 2007Date of Patent: April 12, 2011Assignee: Advanced Display Process Engineering Co., LtdInventor: Seok-Hee Shim
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Patent number: 7886687Abstract: A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.Type: GrantFiled: December 20, 2005Date of Patent: February 15, 2011Assignee: Advanced Display Process Engineering Co. Ltd.Inventors: Young Jong Lee, Jun Young Choi, Saeng Hyun Jo, Young-Joo Hwang, Jong-Cheon Kim
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Patent number: 7879181Abstract: Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.Type: GrantFiled: November 26, 2008Date of Patent: February 1, 2011Assignee: Advanced Display Process Engineering Co., Ltd.Inventors: Young Jong Lee, Jun Young Choi, Saeng Hyun Jo, Hyun Hwan Ahn, Suk-Min Son, Sung Il Ahn
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Patent number: 7699957Abstract: Disclosed is a plasma processing apparatus, in which parasitic plasma is not generated in a transfer chamber. The plasma processing apparatus has a load lock chamber, a transfer chamber, a processing chamber, and gate valves installed between the chambers for transferring a substrate and opening and closing openings of the chambers.Type: GrantFiled: February 28, 2007Date of Patent: April 20, 2010Assignee: Advanced Display Process Engineering Co., Ltd.Inventors: Seoung-Wook Lee, Young-Joo Hwang
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Patent number: 7690913Abstract: An apparatus is provided that forms embossed portions on a workpiece. The apparatus includes a melting chamber filled with melt, such as ceramic, nozzles provided at a lower portion of the melting chamber, and presses provided adjacent to each of the injection nozzles. The injection nozzles drop the melt on the workpiece and the presses press the dropped melt into a predetermined shape of the embossed portions in a state where the dropped melt is being solidified after being dropped on the workpiece.Type: GrantFiled: May 15, 2007Date of Patent: April 6, 2010Assignee: Advanced Display Process Engineering Co., Ltd.Inventor: Hyoung-Kyu Son
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Patent number: 7665946Abstract: A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may combine functions of a transfer chamber and a load-lock chamber. A robot may be provided aside from a center of the transfer chamber, and a buffer may be provided so as to avoid interference with the robot. An aligner may adjust a position of a substrate mounted on the buffer.Type: GrantFiled: November 1, 2004Date of Patent: February 23, 2010Assignee: Advanced Display Process Engineering Co., Ltd.Inventors: Gwang Ho Hur, Jun Young Choi, Sang Baek Lee, Cheol Won Lee