Patents Assigned to Advanced Energy's Voorhees Operations
  • Patent number: 6424232
    Abstract: Matching the variable impedance of a load with the fixed impedance of a radio frequency (RF) power generator to provide maximum power transfer. The impedance matching network further allows a RF power generator to vary the frequency of the voltage applied to a load, e.g., a plasma chamber as may be utilized in semiconductor or flat panel plasma display manufacturing processes. The impedance matching network further utilizes fixed solid state components to adjust the impedance of the attached load to provide maximum power transfer between the generator and the load. A parallel switched capacitor network is controlled by an electrical switching means such as PIN diodes to turn fixed capacitors on or off. A means for varying the frequency of the applied voltage is used to match the impedance of the load with the impedance of the RF power generator within milliseconds.
    Type: Grant
    Filed: November 30, 1999
    Date of Patent: July 23, 2002
    Assignee: Advanced Energy's Voorhees Operations
    Inventors: Anton Mavretic, Tomislav Lozic