Abstract: Various embodiments may provide a method of illuminating a sample plane. The method may include providing an illumination subsystem, the illumination subsystem including an optical source and at least one lens, having an optic axis at an incident angle greater than 0° and less than 90° to a normal of the sample plane. The method may also include rotating the illumination subsystem about a pivot point between the optical source and the sample plane along the optic axis so that an adjusted illumination distribution generated by the illumination subsystem at the sample plane has greater symmetry compared to a reference illumination distribution generated by the illumination subsystem at the sample plane without the rotation about the pivot point.

Abstract: Various embodiments mat relate to a circuit arrangement including a main controller. The circuit arrangement may also include a pulse width modulation driver in electrical connection with the main controller. The circuit arrangement may additionally include a switch selector in electrical connection with the main controller. The circuit arrangement may also include a first switch, a second switch, a third switch and a fourth switch, as well as an inductor and a capacitor.

Abstract: Various embodiments may provide a method of illuminating a sample surface. The method may include arranging an illumination subsystem, the illumination subsystem including an optical source and at least one lens, having an optic axis at an incident angle greater than 0° and less than 90° to a normal of the sample surface such that a reference illumination distribution is directly generated on the sample surface based on optical light emitted by the illumination subsystem. The method may also include arranging an adjustment optical subsystem such that an adjusted illumination distribution which is more symmetrical compared to the reference illumination distribution is generated on the sample surface based on optical light emitted by the illumination subsystem.

Abstract: Various embodiments may provide a method of illuminating a sample plane. The method may include providing an illumination subsystem, the illumination subsystem including an optical source and at least one lens, having an optic axis at an incident angle greater than 0° and less than 90° to a normal of the sample plane. The method may also include rotating the illumination subsystem about a pivot point between the optical source and the sample plane along the optic axis so that an adjusted illumination distribution generated by the illumination subsystem at the sample plane has greater symmetry compared to a reference illumination distribution generated by the illumination subsystem at the sample plane without the rotation about the pivot point.

Abstract: Various embodiments may provide a method of illuminating a sample plane. The method may include providing an illumination subsystem, the illumination subsystem including an optical source and at least one lens, having an optic axis at an incident angle greater than 0° and less than 90° to a normal of the sample plane. The method may also include rotating the illumination subsystem about a pivot point between the optical source and the sample plane along the optic axis so that an adjusted illumination distribution generated by the illumination subsystem at the sample plane has greater symmetry compared to a reference illumination distribution generated by the illumination subsystem at the sample plane without the rotation about the pivot point.