Patents Assigned to Advanced Mircor Devices, Inc.
  • Patent number: 6716683
    Abstract: An integrated circuit die having silicon on insulator (SOI) structure is analyzed in a manner that enhances the ability to detect photoemissions from the die. According to an example embodiment of the present invention, one of two or more lenses having a higher relative photon count is identified and used to analyze a semiconductor die. The die has at least a portion of the insulator of the SOI structure exposed, and photon emissions are detected using each lens via the exposed insulator in response to the die being stimulated. The number of photons detected using each lens is compared, and the lens having a higher photon count rate is identified, optimizing the photon count for the particular type of die preparation used to expose the insulator. The identified lens is then used with the high-speed detector to detect photoemissions from the die, and the detected photoemissions are used to analyze the die.
    Type: Grant
    Filed: June 22, 2001
    Date of Patent: April 6, 2004
    Assignee: Advanced Mircor Devices, Inc.
    Inventors: Michael R. Bruce, Glen P. Gilfeather, Rama R. Goruganthu, Jiann Min Chin, Shawn McBride