Patents Assigned to ADVANCED NANOSTRUCTURES, LLC
  • Semiconductor Strain Gauge and Method for Manufacturing Same
    Publication number: 20210257539
    Abstract: Semiconductor strain gages fabricated on Silicon-on-insulator (SOI) material, and the method of making them. Force sensing elements are uniformly batch-fabricated at wafer level and singulated individually by a wire bonding method. In another method, they are singulated by plucking them off the wafer from their attachment site.
    Type: Application
    Filed: December 4, 2020
    Publication date: August 19, 2021
    Applicant: ADVANCED NANOSTRUCTURES, LLC
    Inventor: Nihat Okulan