Abstract: A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removing material between the perimeter of the mirror/anchor and the outermost holes, and between adjacent holes in the same row. Another mirror device includes a mirror, anchors, and springs coupling the mirror to the anchors. The natural frequency of the device can be adjusted by decoupling one or more springs coupling the mirror to the anchors. The mirror of both devices can includes one or more sacrificial portions. The natural frequencies of the both devices can also be adjusted by trimming the sacrificial portions.

Abstract: A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a wafer to form a first support layer having short stationary comb teeth extending from one or more support pads. The backside of the wafer is etched to form a top layer with a mirror, beam structures extending from the mirror, long rotating comb teeth extending from the beam structures, and long stationary comb teeth extending from stationary pads. The long rotating comb teeth are interdigitated in-plane with the long stationary comb teeth, and the long rotating comb teeth are interdigitated out-of-plane at their tips with the short stationary comb teeth. Asymmetry in the overlap between the long rotating comb teeth and the short stationary comb teeth allows the rotational direction of the mirror to be determined from capacitance measurements. Furthermore, the short stationary comb teeth can be used to initiate oscillation of the mirror.

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) spring elements coupled to the mirror, (3) a beam coupled to the group of spring elements, (4) a spring coupled to the beam, and (5) a stationary pad coupled to the spring. The spring elements includes (1) a straight section having a first end coupled to the beam structure, and (2) spring sections having (a) first ends coupled to a second end of the straight section and (b) second ends coupled to the mirror.

Abstract: A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a silicon wafer to form a first support layer having asymmetric pads. The backside of the silicon wafer is etched to form a top layer with a mirror, beam structures extending from the mirror, and rotating comb teeth extending from the beam structures. Before or after the backside of the silicon wafer is etched, the topside of the silicon wafer is bonded to a glass wafer that forms a second support layer. Prior to bonding the silicon wafer to the glass wafer, the glass wafer may be etched to form a recess and/or a cavity that accommodates mobile elements in the silicon wafer. Due to the asymmetry of the pads in the first support layer below the rotating comb teeth in the top layer, oscillation can be initiated.

Abstract: In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

Abstract: A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

Abstract: A micro-electro-mechanical system (MEMS) device includes an oscillating body and a beam connected to the oscillating body. The beam has a proximal end connected to the oscillating body, a distal end spaced from the oscillating body, and rotational comb teeth extending from the beam. Springs couple the beam to stationary pads to allow the oscillating body to rotate about a rotational axis. The springs are arranged along the rotation axis so at least one spring is located between another spring and the oscillating body. Stationary comb teeth extend from a stationary pad to be interdigitated with the rotational comb teeth extending from the beam. A voltage difference is applied between the stationary and rotational comb teeth to rotate the oscillating body about the rotation axis. A bottom layer includes mounting pads for supporting the stationary pads. An electrode is formed on a surface of the bottom layer.

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) a first group of spring elements coupled to one half of the mirror, (3) a first beam coupled to the first group of spring elements, (4) a first spring coupled to the first beam, and (5) a first stationary pad coupled to the first spring. The device further includes (6) a second group of spring elements coupled in parallel to another half of the mirror, (7) a second beam coupled to the second group of spring elements, (8) a second spring coupled to the second beam, (9) and a second stationary pad coupled to the second spring. The device further includes a third beam that rigidly interconnects the first and the second beams so they rotate the mirror in unison.

Abstract: A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.

Abstract: A projection display system includes a light source emitting a light beam, and a reflecting mirror system for scanning the light beam over an image to illuminate the image. The light source can be solid state such as a laser diode. The reflecting mirror system can be one or more MEMS scanning mirrors that rotate to raster scan the light beam over the image. The image can be an advertisement located on a wall, a screen, a sign, or a billboard. The image can also be a semi-transparent image that is projected onto a medium to produce a larger image.

Abstract: A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removing material between the perimeter of the mirror/anchor and the outermost holes, and between adjacent holes in the same row. Another mirror device includes a mirror, anchors, and springs coupling the mirror to the anchors. The natural frequency of the device can be adjusted by decoupling one or more springs coupling the mirror to the anchors. The mirror of both devices can includes one or more sacrificial portions. The natural frequencies of the both devices can also be adjusted by trimming the sacrificial portions.

Abstract: A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes an mirror, bonding pads, springs, and beams connected to the mirror. The mirror has a width greater than 1000 and less than 1200 microns, a length greater than 4000 and less than 5500 microns, and a thickness greater than 240 microns. Each beam includes a plurality of rotational comb teeth and is connected by multiple springs to the bonding pads.

Abstract: A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removing material between the perimeter of the mirror/anchor and the outermost holes, and between adjacent holes in the same row. Another mirror device includes a mirror, anchors, and springs coupling the mirror to the anchors. The natural frequency of the device can be adjusted by decoupling one or more springs coupling the mirror to the anchors. The mirror of both devices can includes one or more sacrificial portions. The natural frequencies of the both devices can also be adjusted by trimming the sacrificial portions.