Patents Assigned to Advanced Simiconductor Materials/America
  • Rotary vacuum-chuck using no rotary union
    Patent number: 4183545
    Abstract: A vacuum-chuck having no expensive, complex rotary unions in the vacuum lines maintains its vacuum by maintaining the surfaces which rotate with respect to each other in intimate contact with a glabrous, self-lubricating element. The vacuum is communicated to said revolving surfaces through openings in said element.
    Type: Grant
    Filed: July 28, 1978
    Date of Patent: January 15, 1980
    Assignee: Advanced Simiconductor Materials/America
    Inventor: John K. Daly