Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
Type:
Grant
Filed:
June 26, 2011
Date of Patent:
August 13, 2013
Assignee:
Advanced Technology Mateials, Inc.
Inventors:
Dennis Brestovansky, Michael J. Wodjenski, Jose I. Arno, J. Donald Carruthers, Judith A. Moroco