Abstract: A purge nozzle module for supplying nitrogen (N2) to a semiconductor wafer processing apparatus includes a nozzle body with a purge hole formed at a center thereof, and a vacuum pad combined with an upper side of the nozzle body, having a through hole connected to the purge hole formed therethrough, and making close contact with a bottom of a FOUP (Front Opening Unified Pod) by a vacuum pressure.
Abstract: An apparatus for installing, by the blown fibre technique, at least one optical fibre or optical fibre unit (5) into a tube or tubular passageway (6), comprising a length of optical fibre/optical fibre unit on a reel or cartridge (8) which is contained within a pressure vessel (2), the length of optical fibre/optical fibre unit being preterminated at its inside tail by a connector (32).
Type:
Application
Filed:
March 6, 2006
Publication date:
September 18, 2008
Applicant:
AISIN AE CO., LTD.
Inventors:
Rosamund Carol Neat, John Kerry, Matthew John Kerry, Jeremy Norman Hardie-Clay, Ian Rodney Torr