Patents Assigned to Aehr Test Systems
  • Patent number: 7667475
    Abstract: The invention relates to a tester apparatus of the kind including a portable supporting structure for removably holding and testing a substrate carrying a microelectronic circuit. An interface on the stationary structure is connected to the first interface when the portable structure is held by the stationary structure and is disconnected from the first interface when the portable supporting structure is removed from the stationary structure. An electrical tester is connected through the interfaces so that signals may be transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit.
    Type: Grant
    Filed: April 4, 2008
    Date of Patent: February 23, 2010
    Assignee: AEHR Test Systems
    Inventors: Steven C. Steps, Scott E. Lindsey, Kenneth W. Deboe, Donald P. Richmond, II, Alberto Calderon
  • Patent number: 7619428
    Abstract: A burn-in and electrical test system (20) includes a temperature controlled zone (22) and a cool zone (24) separated by a transition zone 25. The temperature controlled zone (22) is configured to receive a plurality of wafer cartridges (26) and connect the cartridges (26) to test electronics (28) and power electronics (30), which are mounted in the cool zone (24). Each of the wafer cartridges (26) contains a semiconductor wafer incorporating a plurality of integrated circuits. The test electronics (28) consists of a pattern generator PCB (100) and a signal driver and fault analysis PCB (102) connected together by a parallel bus (104). The pattern generator PCB (100) and the fault analysis PCB (102) are connected to a rigid signal probe PCB (104) in cartridge (26) to provide a straight through signal path.
    Type: Grant
    Filed: November 21, 2003
    Date of Patent: November 17, 2009
    Assignee: Aehr Test Systems
    Inventors: Donald Paul Richmond, II, John Dinh Hoang, Jerzy Lobacz
  • Publication number: 20090160468
    Abstract: A cartridge, including a cartridge frame, formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame, a contactor support structure, a contactor interface on the contactor support structure, a plurality of terminals, held by the contactor support structure, for contacting contacts on a device, and a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.
    Type: Application
    Filed: December 19, 2007
    Publication date: June 25, 2009
    Applicant: Aehr Test Systems
    Inventors: Scott E. Lindsey, Jovan Jovanovic, David S. Hendrickson, Donald P. Richmond, II
  • Patent number: 7541822
    Abstract: A cartridge (10) includes a chuck plate (12) for receiving a wafer (74) and a probe plate (14) for establishing electrical contact with the wafer. In use, a mechanical connecting device (90) locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card (50) that is movably mounted to the probe plate by means of a plurality of leaf springs (52.) The mechanical connecting device is preferably a kinematic coupling including a male connector (94) and first and second opposed jaws (122, 124.) Each of the jaws is pivotable from a retracted position in which the male connector can be inserted between the jaws and an engaging position in which the jaws prevent withdrawal of the male connector from between the jaws. The male connector is movable between an extended and a retracted position, and is biased towards the retracted position.
    Type: Grant
    Filed: February 23, 2006
    Date of Patent: June 2, 2009
    Assignee: Aehr Test Systems
    Inventors: Frank Otto Uher, John William Andberg, Mark Charles Carbone, Donald Paul Richmond, II
  • Patent number: 7511521
    Abstract: In one embodiment, the invention provides a test assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component. The assembly comprises a contactor assembly to interconnect with the test component, a probe assembly to mechanically support the contactor assembly and electrically connect the contactor assembly to the testing machine, and a clamping mechanism comprising a first clamping member and a second clamping member, the clamping members being urged together to exert a clamping force to deform contactor bumps of an electrical connection between the probe assembly and the contactor assembly.
    Type: Grant
    Filed: March 10, 2008
    Date of Patent: March 31, 2009
    Assignee: AEHR Test Systems
    Inventors: Donald P. Richmond, II, Jovan Jovanovic
  • Publication number: 20090015282
    Abstract: The invention relates to a tester apparatus of the kind including a portable supporting structure for removably holding and testing a substrate carrying a microelectronic circuit. An interface on the stationary structure is connected to the first interface when the portable structure is held by the stationary structure and is disconnected from the first interface when the portable supporting structure is removed from the stationary structure. An electrical tester is connected through the interfaces so that signals may be transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit.
    Type: Application
    Filed: April 4, 2008
    Publication date: January 15, 2009
    Applicant: Aehr Test Systems
    Inventors: Steven C. Steps, Scott E. Lindsey, Kenneth W. Deboe, Donald P. Richmond, II, Alberto Calderon
  • Publication number: 20080150560
    Abstract: In one embodiment, the invention provides a test assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component. The assembly comprises a contactor assembly to interconnect with the test component, a probe assembly to mechanically support the contactor assembly and electrically connect the contactor assembly to the testing machine, and a clamping mechanism comprising a first clamping member and a second clamping member, the clamping members being urged together to exert a clamping force to deform contactor bumps of an electrical connection between the probe assembly and the contactor assembly.
    Type: Application
    Filed: March 10, 2008
    Publication date: June 26, 2008
    Applicant: Aehr Test Systems
    Inventors: Donald P. Richmond, Jovan Jovanovic
  • Patent number: 7385407
    Abstract: In one embodiment, the invention provides a test assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component. The assembly comprises a contactor assembly to interconnect with the test component, a probe assembly to mechanically support the contactor assembly and electrically connect the contactor assembly to the testing machine, and a clamping mechanism comprising a first clamping member and a second clamping member, the clamping members being urged together to exert a clamping force to deform contactor bumps of an electrical connection between the probe assembly and the contactor assembly.
    Type: Grant
    Filed: May 12, 2006
    Date of Patent: June 10, 2008
    Assignee: Aehr Test Systems
    Inventors: Donald P. Richmond, II, Jovan Jovanovic
  • Patent number: 7303929
    Abstract: A method of testing microelectronic dies is described. A respective set of dies is inserted into die carrier bodies releasably held within a set of sockets secured to a burn-in board. A set of die carrier covers is closed, each die carrier cover being secured to a respective die carrier body and closing over a respective die. The burn-in board is then inserted into a burn-in oven. Burn-in testing of the dies is then carried out while in the burn-in oven. The burn-in board is then removed from the oven. The die carrier covers are then opened. The dies are removed from the die carrier bodies without removing the die carrier bodies from the sockets. The process is then repeated with subsequent sets of dies.
    Type: Grant
    Filed: September 13, 2004
    Date of Patent: December 4, 2007
    Assignee: Aehr Test Systems
    Inventors: Martin A. Hemmerling, Seang P. Malathong
  • Patent number: 7301358
    Abstract: A method of assembling a test contactor is described. The method includes aligning an interposer and an electrical contactor wherein resilient interconnection elements of the interposer are resiliently deformed into a deformed state to make electrical contact with corresponding electrical terminals on the electrical contactor; and securing the interposer and the electrical contactor together to lock the resilient interconnection elements in said deformed state.
    Type: Grant
    Filed: October 22, 2004
    Date of Patent: November 27, 2007
    Assignee: Aehr Test Systems
    Inventors: Jovan Jovanovic, Frank O. Uher, Donald P. Richmond, II
  • Patent number: 7126363
    Abstract: A die carrier is disclosed which is specifically designed for use in a TSOP socket. More specifically, the die carrier has a carrier substrate with carrier contacts thereon that are dimensioned specifically to match the positioning of the upper and lower socket contacts. The carrier substrate, being 145 microns thick, can also fit between the upper and lower socket contacts. A carrier base support component is located below a portion only of the carrier substrate, and does not impair insertion of the carrier substrate into the relatively small spacing between the upper and lower socket contacts. Damage to the carrier substrate is avoided by clamping edges of the carrier substrate from opposing sides between the upper and lower socket contacts. There are no screws or nuts within the carrier base support component that may increase its size and prevent it from being inserted into the socket.
    Type: Grant
    Filed: January 10, 2005
    Date of Patent: October 24, 2006
    Assignee: Aehr Test Systems
    Inventors: Seang P. Malathong, Martin A. Hemmerling
  • Patent number: 7088117
    Abstract: A cartridge (10) includes a chuck plate (12) for receiving a wafer (74) and a probe plate (14) for establishing electrical contact with the wafer. In use, a mechanical connecting device (90) locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card (50) that is movably mounted to the probe plate by means of a plurality of leaf springs (52.) The mechanical connecting device is preferably a kinematic coupling including a male connector (94) and first and second opposed jaws (122, 124.) Each of the jaws is pivotable from a retracted position in which the male connector can be inserted between the jaws and an engaging position in which the jaws prevent withdrawal of the male connector from between the jaws. The male connector is movable between an extended and a retracted position, and is biased towards the retracted position.
    Type: Grant
    Filed: March 24, 2003
    Date of Patent: August 8, 2006
    Assignee: Aehr Test System
    Inventors: Frank Otto Uher, John William Andberg, Mark Charles Carbone, Donald Paul Richmond, II
  • Patent number: 7063544
    Abstract: A system is provided which allows for burn-in testing of electronic devices wherein power current is provided individually to each one of the electronic devices. The system also includes various connectors, cables, and other configurations that allow for power currents having large magnitudes to be provided to the electronic devices.
    Type: Grant
    Filed: August 11, 2004
    Date of Patent: June 20, 2006
    Assignee: Aehr Test Systems
    Inventors: Bradley R. Gunn, Alberto J. Calderon, Jovan Jovanovic, David S. Hendrickson
  • Patent number: 7053644
    Abstract: A system for testing integrated circuits is described. A contactor board of the system has pins with ends that contact terminals on a power and signal distribution board. Opposing ends of the pins make contact with die terminals on an unsingulated wafer. The distribution board also carries a plurality of capacitors, at least one capacitor corresponding to every die on the unsingulated wafer. Each capacitor may include two substantially flat planar capacitor conductors and a dielectric layer between the capacitor conductors. Alternatively, the capacitors may be discrete components mounted to and standing above the distribution board, in which case corresponding capacitor openings are formed in the contactor substrate to accommodate the capacitors when the distribution board and the contactor board are brought together. A plurality of fuses made of a polymer material are also provided.
    Type: Grant
    Filed: December 15, 2004
    Date of Patent: May 30, 2006
    Assignee: Aehr Test Systems
    Inventors: Scott E. Lindsey, Carl N. Buck, Rhea J. Posedel
  • Patent number: 7046022
    Abstract: In one embodiment, the invention provides a test assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component. The assembly comprises a contactor assembly to interconnect with the test component, a probe assembly to mechanically support the contactor assembly and electrically connect the contactor assembly to the testing machine, and a clamping mechanism comprising a first clamping member and a second clamping member, the clamping members being urged together to exert a clamping force to deform contactor bumps of an electrical connection between the probe assembly and the contactor assembly.
    Type: Grant
    Filed: August 6, 2004
    Date of Patent: May 16, 2006
    Assignee: Aehr Test Systems
    Inventors: Donald P. Richmond, II, Jovan Jovanovic
  • Patent number: 6867608
    Abstract: In one embodiment, the invention provides a test assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component. The assembly comprises a contactor assembly to interconnect with the test component, a probe assembly to mechanically support the contactor assembly and electrically connect the contactor assembly to the testing machine, and a clamping mechanism comprising a first clamping member and a second clamping member, the clamping members being urged together to exert a clamping force to deform contactor bumps of an electrical connection between the probe assembly and the contactor assembly.
    Type: Grant
    Filed: July 16, 2002
    Date of Patent: March 15, 2005
    Assignee: Aehr Test Systems
    Inventors: Donald P. Richmond, II, Jovan Jovanovic
  • Patent number: 6859057
    Abstract: A die carrier is disclosed which is specifically designed for use in a TSOP socket. More specifically, the die carrier has a carrier substrate with carrier contacts thereon that are dimensioned specifically to match the positioning of the upper and lower socket contacts. The carrier substrate, being 145 microns thick, can also fit between the upper and lower socket contacts. A carrier base support component is located below a portion only of the carrier substrate, and does not impair insertion of the carrier substrate into the relatively small spacing between the upper and lower socket contacts. Damage to the carrier substrate is avoided by clamping edges of the carrier substrate from opposing sides between the upper and lower socket contacts. There are no screws or nuts within the carrier base support component that may increase its size and prevent it from being inserted into the socket.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: February 22, 2005
    Assignee: Aehr Test Systems
    Inventors: Seang P. Malathong, Martin A. Hemmerling
  • Patent number: 6853209
    Abstract: The invention provides a contactor assembly.
    Type: Grant
    Filed: July 16, 2002
    Date of Patent: February 8, 2005
    Assignee: Aehr Test Systems
    Inventors: Jovan Jovanovic, Frank O. Uher, Donald P. Richmond, II
  • Patent number: 6815966
    Abstract: A system is provided which allows for burn-in testing of electronic devices wherein power current is provided individually to each one of the electronic devices. The system also includes various connectors, cables, and other configurations that allow for power currents having large magnitudes to be provided to the electronic devices.
    Type: Grant
    Filed: June 27, 2002
    Date of Patent: November 9, 2004
    Assignee: Aehr Test Systems
    Inventors: Bradley R. Gunn, Alberto J. Calderon, Jovan Jovanovic, David S. Hendrickson
  • Publication number: 20040113645
    Abstract: A burn-in and electrical test system (20) includes a temperature controlled zone (22) and a cool zone (24) separated by a transition zone 25. The temperature controlled zone (22) is configured to receive a plurality of wafer cartridges (26) and connect the cartridges (26) to test electronics (28) and power electronics (30), which are mounted in the cool zone (24). Each of the wafer cartridges (26) contains a semiconductor wafer incorporating a plurality of integrated circuits. The test electronics (28) consists of a pattern generator PCB (100) and a signal driver and fault analysis PCB (102) connected together by a parallel bus (104). The pattern generator PCB (100) and the fault analysis PCB (102) are connected to a rigid signal probe PCB (104) in cartridge (26) to provide a straight through signal path.
    Type: Application
    Filed: November 21, 2003
    Publication date: June 17, 2004
    Applicant: Aehr Test Systems
    Inventors: Donald Paul Richmond, John Dinh Hoang, Jerzy Lobacz