Abstract: A liquid vaporizing and feeding apparatus, having high heat transfer efficiency and capable of producing a large flow of vaporized gas from a small amount of liquid, utilizes an inclined vaporization plate which is held at a set temperature by a heater. Liquid, discharged by a nozzle in the vicinity of the upper end of the vaporization plate, is vaporized as it flows down an inclined upper face of the vaporization plate. When the volume of the liquid collected on the vaporization plate 20 reaches a designated amount, a level sensor 40 stops the inflow of liquid through the nozzle. Then, as vaporization continues, and the liquid level falls, the sensor causes inflow of liquid to resume. The cycle of stopping and resuming flow of liquid is repeated to maintain a constant liquid level.

Abstract: An exhauster pressure control system capable of keeping the gas pressure constant regardless of variation in the flow rate of the gas to be controlled. An inlet port 22 and an outlet port 24 are formed in a main body 20 and a spool 40 is held against sliding surfaces 29a and 29b by a spring 28. A pilot chamber 30 is located below the spool 40 and an internal pressure of the pilot chamber is held above a gas pressure at the inlet port 22. A pressure sensor S to detect the gas pressure at the inlet port 22, a control valve V to supply regulating gas to the pilot chamber 30 and a control circuit C to drive the control valve V according to an output of the pressure sensor are provided outside the main body 20, wherein the gas pressure at the inlet port 22 as detected by the pressure sensor S is fed back to the control circuit C, thereby actuating the control valve V to supply regulating gas to the pilot chamber.

Abstract: It is intended to provide a vaporizer in a liquid material vaporizing and feeding apparatus for allowing a liquid to absorb heat efficiently and vaporizing it thereby without pulsation of the liquid or formation of air bubbles.In a lower end face of an upper member 20 is formed a recess 24 into which a liquid material inlet 22 opens, and a valve member 50 is disposed so as to cover the recess 24.With a spring S, the valve member 50 is urged in a direction in which it comes into close contact with the lower end face of the upper member 20. A vaporizing portion 26 is formed between an upper surface of the valve member 50 and the upper member 20, and a pressure intensifying portion 58 is formed by both the upper surface of the valve member 50 and the recess 24.A liquid material fed from the liquid material inlet 22 depresses the valve member 50 through the pressure intensifying portion 58, and when the liquid material is diffused in the vaporizing portion 26, it is heated and vaporizes in an instant.

Abstract: A flow control valve for a semiconductor manufacturing process, which valve utilizes a pressure sensor between the flow control valve and a subsequent sonic nozzle to detect the gas pressure which is fed back to the valve to control the flow through the valve.

Abstract: A connecting member connected to an extension of a massflow controller has attached thereto a gatelike member to hold the connecting member from opposite sides thereof. The gatelike member has a pressing member for pressing the extension against the connecting member from immediately above a seal portion between the extension and the connecting member.