Abstract: In a material transfer device, an articulated arm assembly extends and retracts in a "froglike" motion to transfer an object between a plurality of locations. The articulated arm assembly is rotatable about a pivot point in a radial plane and can be raised or lowered in an axial direction.

Abstract: The present invention provides a laser scanning system of compact size and relatively long focal length which may be used in laser surface inspection system for silicon wafers and the like. The scanning system employs a folded optical cell having a pair of reflective surfaces so oriented that the scanning laser beam is folded, and reflects from each of the reflective surfaces several times to significantly increase the focal length. The folded optical cell is also effective to produce a collimated, substantially parallel scan pattern such that the beam remains perpendicular to the inspection surface as it is scanned. The folded optical cell can also be set for divergent or convergent scan.

Abstract: A system for laser scanning a relatively movable reflective surface element and inspecting that surface by monitoring the reflected energy in both light and dark channel receivers. Flaws occurring on the surface of the element, depending on the types of flaws, cause various frequency components to be present in the reflected energy and affect the amount of energy reflected to the light and dark channel receivers. Circuitry is included to detect and classify the various types of flaws as they are scanned, to compute the condition of the inspected element and to grade that inspected element as being in an acceptable state or in one of a plurality of unacceptable states. The described reflective surface element is a silicon wafer of the type used as the base substrate in fabricating integrated circuits and other electronic components.