Abstract: Disclosed is an RF (Radio Frequency) power source having a power supply configured to convert an AC (Alternating Current) voltage at a power supply input to a second voltage at a power supply output, and an RF generator configured to receive the second voltage at an RF generator input and to use the second voltage to produce an output RF signal at an RF generator output. According to an embodiment of the disclosure, the power supply performs the voltage conversion without galvanic isolation between the power supply input and the power supply output, which can increase energy efficiency while reducing complexity and cost as well. Instead, the RF generator is provided with galvanic isolation between the RF generator input and the RF generator output, which can be sufficient for achieving galvanic isolation between the power supply input and the RF generator output for safety reasons.