Patents Assigned to AG Microsystems Inc.
  • Rotatable micromirror with improved shock and vibration performance
    Patent number: 11726312
    Abstract: A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.
    Type: Grant
    Filed: June 20, 2022
    Date of Patent: August 15, 2023
    Assignee: AG MICROSYSTEMS, INC.
    Inventors: Asif Godil, Chase Valiente
  • MICROMIRROR WITH IMPROVED SHOCK AND VIBRATION PERFORMANCE
    Publication number: 20220390741
    Abstract: A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.
    Type: Application
    Filed: June 20, 2022
    Publication date: December 8, 2022
    Applicant: AG MICROSYSTEMS, INC.
    Inventors: Asif GODIL, Chase VALIENTE
  • Micromirror with improved shock and vibration performance having differing hinge portions
    Patent number: 11372234
    Abstract: A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.
    Type: Grant
    Filed: October 4, 2019
    Date of Patent: June 28, 2022
    Assignee: AG MICROSYSTEMS, INC.
    Inventors: Asif Godil, Chase Valiente
  • Micro electro mechanical system and layered hinge for use in MEMS micromirror having first and second serpentine shapes
    Patent number: 10437046
    Abstract: Two-axis MEMS Micromirror is disclosed featuring combs drive actuation with independent drive for each of two axes of rotation and a layered hinge design providing an improved shock and vibration performance. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, actuation voltages are driven to an inner axis through multiple layers in one or more outer hinges, allowing for a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration. Furthermore, this novel design achieves set angles that are highly stable over time.
    Type: Grant
    Filed: May 4, 2016
    Date of Patent: October 8, 2019
    Assignee: AG MICROSYSTEMS, INC.
    Inventors: Asif Godil, Chase Valiente
  • Micro-electro mechanical system using snapping tabs, comb and parallel plate actuation
    Patent number: 7986073
    Abstract: The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.
    Type: Grant
    Filed: November 19, 2010
    Date of Patent: July 26, 2011
    Assignee: AG Microsystems Inc.
    Inventor: Asif A. Godil
  • Micro electro mechanical system using comb and parallel plate actuation
    Publication number: 20110102871
    Abstract: The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.
    Type: Application
    Filed: November 19, 2010
    Publication date: May 5, 2011
    Applicant: AG Microsystems, INC.
    Inventor: Asif A. Godil
  • Micro electro mechanical system using comb and parallel plate actuation
    Patent number: 7863799
    Abstract: The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.
    Type: Grant
    Filed: March 1, 2008
    Date of Patent: January 4, 2011
    Assignee: AG Microsystems Inc.
    Inventor: Asif Aziz Godil