Patents Assigned to AGC Electronic Materials
  • CHEMICAL VAPOR DEPOSITED SILICON CARBIDE ARTICLES
    Publication number: 20110274874
    Abstract: Chemical vapor deposited silicon carbide articles and the methods of making them are disclosed. The chemical vapor deposited silicon carbide articles are composed of multiple parts which are joined together by sintered ceramic joints. The joints strengthen and maintain tolerances at the joints of the articles. The articles may be used in semi-conductor processing.
    Type: Application
    Filed: February 24, 2011
    Publication date: November 10, 2011
    Applicants: AGC Electronic Materials, Rohm and Haas Electronic Materials LLC
    Inventors: Michael A. PICKERING, Jamie L. Mayer, Kevin D. Lais
  • Chemical vapor deposited silicon carbide articles
    Publication number: 20080226868
    Abstract: Chemical vapor deposited silicon carbide articles and the methods of making them are disclosed. The chemical vapor deposited silicon carbide articles are composed of multiple parts which are joined together by sintered ceramics joints. The joints strengthen and maintain tolerances at the joints of the articles. The articles may be used in semi-conductor processing.
    Type: Application
    Filed: March 7, 2008
    Publication date: September 18, 2008
    Applicants: Rohm and Haas Electronic Materials LLC, AGC Electronic Materials
    Inventors: Michael A. Pickering, Jamie L. Mayer, Kevin D. Lais