Abstract: A vibration-isolator joint for a vacuum device is connected to a vacuum pump and to a vacuum chamber used to evacuate the vacuum chamber. The joint includes a bellows having an internal portion via which evacuation is effected, a first end connected to the vacuum pump, a second end connected to the vacuum chamber, and a support structure that, when the bellows has been compressed by a prescribed amount, prevents further compression of the bellows and also communicates to the bellows vibration in a direction other than the direction in which the bellows expands and contracts.
Type:
Grant
Filed:
October 16, 1998
Date of Patent:
May 23, 2000
Assignee:
Agency of Industries Science & Technology, Ministry of International Trade & Industry