Abstract: A switch comprises a first wafer having a thin-film structure defined thereon, a second wafer having a plurality of features defined therein, and a seal between the first wafer and the second wafer forming a two-wafer structure having a liquid metal microswitch defined therebetween.
Type:
Grant
Filed:
June 30, 2005
Date of Patent:
April 15, 2008
Assignee:
Agilent Technlolgies, Inc.
Inventors:
Timothy Beerling, Steven A. Rosenau, Benjamin P. Law, Ronald Shane Fazzio, Marco Aimi