Abstract: A fluid-directing device, which may be a CVD showerhead, includes a unitary body of additive metal construction, which may be made by 3D metal printing. The unitary body has a passage(s), fluid entrance(s), and fluid exit(s), arranged to direct fluid(s). The passage(s), fluid entrance(s) and fluid exit(s) include at least one cross-section shape not readily achieved through in-line drilling.
Type:
Grant
Filed:
August 4, 2023
Date of Patent:
June 24, 2025
Assignee:
Agnitron Technology, Inc.
Inventors:
Aaron Fine, Andrei Osinsky, Evan Buskirk, Alexei Osinksy
Abstract: A fluid-directing device, which may be a CVD showerhead, includes a unitary body of additive metal construction, which may be made by 3D metal printing. The unitary body has a passage(s), fluid entrance(s), and fluid exit(s), arranged to direct fluid(s). The passage(s), fluid entrance(s) and fluid exit(s) include at least one cross-section shape not readily achieved through in-line drilling.
Type:
Grant
Filed:
February 15, 2023
Date of Patent:
June 18, 2024
Assignee:
Agnitron Technology, Inc.
Inventors:
Aaron Fine, Andrei Osinksy, Evan Buskirk, Alexei Osinksy