Patents Assigned to Air Liquide Electronics U.S. LP
-
Patent number: 11430663Abstract: A method for etching silicon-containing films is disclosed. The method includes the steps of introducing a vapor of an iodine-containing etching compound into a reaction chamber containing a silicon-containing film on a substrate, wherein the iodine-containing etching compound has the formula CaHxFyIz, wherein a=1-3, x=0-6, y=1-7, z=1-2, x+y+z=4 when a=1, x+y+z=4 or 6 when a=2, and x+y+z=6 or 8 when a=3; introducing an inert gas into the reaction chamber; and activating a plasma to produce an activated iodine-containing etching compound capable of etching the silicon-containing film from the substrate.Type: GrantFiled: March 3, 2020Date of Patent: August 30, 2022Assignees: American Air Liquide, Inc., L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Air Liquide Electronics U.S. LPInventors: Vijay Surla, Rahul Gupta, Hui Sun, Venkateswara R. Pallem, Nathan Stafford, Fabrizio Marchegiani, Vincent M. Omarjee, James Royer
-
Patent number: 11024513Abstract: Methods for minimizing sidewall damage during low k etch processes are disclosed. The methods etch the low k layers f using the plasma activated vapor of an organofluorine compound having a formula selected from the group consisting of N?C—R; (N@C—)—(R)—(—C?N); Rx[-C?N(Rz)]y; and R(3-a)-N—Ha, wherein a=1-2, x=1-2, y=1-2, z=0-1, x+z=1-3, and each R independently has the formula HaFbCc with a=0-11, b=0-11, and c=0-5.Type: GrantFiled: December 29, 2017Date of Patent: June 1, 2021Assignee: Air Liquide Electronics U.S. LPInventors: Chih-Yu Hsu, Peng Shen, Nathan Stafford
-
Patent number: 10739795Abstract: Methods and systems for high precision, continuous blending of mixtures, and particularly mixtures having at least two distinct chemical components, are disclosed. More particularly, the disclosed methods and systems provide high precision, continuous blending of buffered oxide etch mixtures containing water, ammonium fluoride, and hydrofluoric acid.Type: GrantFiled: March 6, 2019Date of Patent: August 11, 2020Assignee: Air Liquide Electronics U.S. LPInventor: Kevin T. O'Dougherty
-
Patent number: 10720335Abstract: Replacement chemistries for the cC4F8 passivation gas in the Bosch etch process and processes for using the same are disclosed. These chemistries have the formula CxHyFz, with 1?x<7, 1?y?13, and 1?z?13. The replacement chemistries may reduce RIE lag associated with deep silicon aperture etching.Type: GrantFiled: August 28, 2018Date of Patent: July 21, 2020Assignees: American Air Liquide, Inc., L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Air Liquide Electronics U.S. LPInventors: Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford
-
Patent number: 10607850Abstract: A method for etching silicon-containing films is disclosed. The method includes the steps of introducing a vapor of an iodine-containing etching compound into a reaction chamber containing a silicon-containing film on a substrate, wherein the iodine-containing etching compound has the formula CaHxFyIz, wherein a=1-3, x=0-6, y=1-7, z=1-2, x+y+z=4 when a=1, x+y+z=4 or 6 when a=2, and x+y+z=6 or 8 when a=3; introducing an inert gas into the reaction chamber; and activating a plasma to produce an activated iodine-containing etching compound capable of etching the silicon-containing film from the substrate.Type: GrantFiled: December 30, 2016Date of Patent: March 31, 2020Assignees: American Air Liquide, Inc., Air Liquide Electronics U.S. LP, L'Air Liquide, SociétéAnonyme pour l'Etude et l'Exploitation des Procédés Georges ClaudeInventors: Vijay Surla, Rahul Gupta, Hui Sun, Venkateswara R. Pallem, Nathan Stafford, Fabrizio Marchegiani, Vincent M. Omarjee, James Royer
-
Patent number: 10529581Abstract: Methods for isotropic etching at least a portion of a silicon-containing layer on a sidewall of high-aspect-ratio (HAR) apertures formed on a substrate in a reaction chamber are disclosed. The HAR aperture formed by plasma etching a stack of alternating layers of a first silicon-containing layer and a second silicon-containing layer, the second silicon-containing layer is different from the first silicon-containing layer. The method comprising the steps of: a) introducing a fluorine containing etching gas selected from the group consisting of nitrosyl fluoride (FNO), trifluoroamine oxide (F3NO), nitryl fluoride (FNO2) and combinations thereof into the reaction chamber; and b) removing at least a portion of the second silicon-containing layers by selectively etching the second silicon-containing layers versus the first silicon-containing layers with the fluorine containing etching gas to produce recesses between the first silicon-containing layers on the sidewall of the HAR aperture.Type: GrantFiled: December 29, 2017Date of Patent: January 7, 2020Assignees: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Air Liquide Electronics U.S. LPInventors: Chih-Yu Hsu, Peng Shen, Takashi Teramoto, Nathan Stafford, Jiro Yokota
-
Patent number: 10371566Abstract: Liquid tank measuring systems that weigh/measure the amount of liquid in a fixed tank/vessel are disclosed. Also disclosed are methods that provide load cell failure detection of the liquid tank measuring system and the ability to continue operations post load cell failure detection.Type: GrantFiled: December 30, 2016Date of Patent: August 6, 2019Assignee: Air Liquide Electronics U.S. LPInventors: Bryan L. Smith, Mark Stang, Mike Miano, Billy W. Luetkahans, Daniel J. Fuchs, Matt Kelly, Bryon Perkins, Justin Gauthier, Kevin T. O'Dougherty
-
Patent number: 10370170Abstract: A packing article for the storage and/or transport of items and materials requiring high levels of cleanliness is described. Methods of making and using the packaging article are also described. The packaging article may be used to store or transport, for example, advanced optical components, or materials and components used in the manufacturing of microelectronic devices or optical components. A method of making the packaging article includes contacting the packaging article with organic solvent(s) and acidic solution(s) and rinsing with ultrapure water. Interior cleanliness levels for various contaminants, such as, metals, anionic materials, organic compounds, and particles may be verified and the packaging articles may be labeled and sorted according to cleanliness level.Type: GrantFiled: August 24, 2016Date of Patent: August 6, 2019Assignee: Air Liquide Electronics U.S. LPInventors: Fuhe Li, James Scott Anderson
-
Patent number: 10103031Abstract: Replacement chemistries for the cC4F8 passivation gas in the Bosch etch process and processes for using the same are disclosed. These chemistries have the formula CxHyFz, with 1?x<7, 1?y?13, and 1?z?13. The replacement chemistries may reduce RIE lag associated with deep silicon aperture etching.Type: GrantFiled: September 8, 2017Date of Patent: October 16, 2018Assignees: L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Georges Claude, American Air Liquide, Inc., Air Liquide Electronics U.S. LPInventors: Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford
-
Patent number: 9892932Abstract: Replacement chemistries for the cC4F8 passivation gas in the Bosch etch process and processes for using the same are disclosed. These chemistries have the formula CxHyFz, with 1 ?x<7, 1?y?13, and 1?z?13. The replacement chemistries may reduce RIE lag associated with deep silicon aperture etching.Type: GrantFiled: June 17, 2015Date of Patent: February 13, 2018Assignees: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, American Air Liquide, Inc., Air Liquide Electronics U.S. LPInventors: Peng Shen, Christian Dussarrat, Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford
-
Patent number: 9517873Abstract: A packing article for the storage and/or transport of items and materials requiring high levels of cleanliness is described. Methods of making and using the packaging article are also described. The packaging article may be used to store or transport, for example, advanced optical components, or materials and components used in the manufacturing of microelectronic devices or optical components. A method of making the packaging article includes contacting the packaging article with organic solvent(s) and acidic solution(s) and rinsing with ultrapure water. Interior cleanliness levels for various contaminants, such as, metals, anionic materials, organic compounds, and particles may be verified and the packaging articles may be labeled and sorted according to cleanliness level.Type: GrantFiled: September 28, 2012Date of Patent: December 13, 2016Assignee: Air Liquide Electronics U.S. LPInventors: Fuhe Li, James Scott Anderson
-
Patent number: 9073952Abstract: Si(OEt)2[CH2—Si(OEt)3]2 compounds are synthesized by reacting a Grignard reagent having the formula Si(OEt)3(CH2MgCl) with a quenching agent having the formula Si(OEt)2Cl2.Type: GrantFiled: April 27, 2012Date of Patent: July 7, 2015Assignees: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, American Air Liquide, Inc., Air Liquide Electronics U.S. LPInventors: Zhiwen Wan, Ziyun Wang, Ashutosh Misra, Jean-Marc Girard, Andrey V. Korolev
-
Patent number: 8859797Abstract: A SiH[CH2—Si(OEt)3]3 carbosilane compound is synthesized by reacting a Grignard reagent having the formula Si(OEt)3(CH2MgCl) with a quenching agent having the formula SiHCl3.Type: GrantFiled: August 22, 2013Date of Patent: October 14, 2014Assignees: Air Liquide Electronics U.S. LP, L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, American Air Liquide, Inc.Inventors: Zhiwen Wan, Ziyun Wang, Ashulosh Misra, Jean-Marc Girard, Claudia Fafard, Andrey V. Korolev
-
Patent number: 8852460Abstract: Methods and compositions for the deposition of a film on a substrate. In general, the disclosed compositions and methods utilize a precursor containing calcium or strontium.Type: GrantFiled: March 18, 2009Date of Patent: October 7, 2014Assignees: Air Liquide Electronics U.S. LP, American Air Liquide, Inc.Inventors: Olivier Letessier, Christian Dussarrat, Benjamin J. Feist, Vincent M. Omarjee
-
Patent number: 8702297Abstract: Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.Type: GrantFiled: October 31, 2012Date of Patent: April 22, 2014Assignees: Air Liquide Electronics U.S. LP, Air Liquide Electronics SystemsInventors: Karl J. Urquhart, Georges Guarneri, Jean-Louis Marc, Norbert Fanjat, Laurent Langellier, Christophe Colin
-
Patent number: 8591095Abstract: Systems for controlling fluids in semiconductor processing systems are disclosed. The disclosed systems comprise a chemical blender, a reclaim tank, a dispense system, two chemical monitors, a controller, and a reclamation line in fluid communication with an outlet of the process station and coupled to the reclaim tank. The reclaim tank mixes solution from the chemical blender and the reclamation line. One of the two chemical monitors the mixed solution downstream from the dispense system. The controller is configured to flow the mixed solution to the process station upon determination by the first chemical monitor that at least one chemical compound in the mixed solution is at a predetermined concentration. The second chemical monitor monitors the reclaimed portion of the mixed solution to determine whether the at least one chemical compound is at a predetermined concentration before being reintroduced into the reclaim tank.Type: GrantFiled: July 31, 2012Date of Patent: November 26, 2013Assignee: Air Liquide Electronics U.S. LPInventors: Norbert Fanjat, Karl J. Urquart, Axel Soulet, Laurent Langellier
-
Publication number: 20130112276Abstract: Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.Type: ApplicationFiled: October 31, 2012Publication date: May 9, 2013Applicants: Air Liquide Electronics Systems, Air Liquide Electronics U.S. LPInventors: Air Liquide Electronics U.S. LP, Air Liquide Electronics Systems
-
Patent number: 8435428Abstract: Methods for forming a film on a substrate in a semiconductor manufacturing process. A reaction chamber a substrate in the chamber are provided. A ruthenium based precursor, which includes ruthenium tetroxide dissolved in a mixture of at least two non-flammable fluorinated solvents, is provided and a ruthenium containing film is produced on the substrate.Type: GrantFiled: January 20, 2011Date of Patent: May 7, 2013Assignee: Air Liquide Electronics U.S. LPInventors: Bin Xia, Ashutosh Misra
-
Publication number: 20130028043Abstract: Systems for controlling fluids in semiconductor processing systems are disclosed. The disclosed systems comprise a chemical blender, a reclaim tank, a dispense system, two chemical monitors, a controller, and a reclamation line in fluid communication with an outlet of the process station and coupled to the reclaim tank. The reclaim tank mixes solution from the chemical blender and the reclamation line. One of the two chemical monitors the mixed solution downstream from the dispense system. The controller is configured to flow the mixed solution to the process station upon determination by the first chemical monitor that at least one chemical compound in the mixed solution is at a predetermined concentration. The second chemical monitor monitors the reclaimed portion of the mixed solution to determine whether the at least one chemical compound is at a predetermined concentration before being reintroduced into the reclaim tank.Type: ApplicationFiled: July 31, 2012Publication date: January 31, 2013Applicant: Air Liquide Electronics U.S. LPInventors: Norbert FANJAT, Karl J. URQUART, Axel SOULET, Laurent LANGELLIER
-
Patent number: 8361199Abstract: Methods of purifying H2Se by removing H2S and/or H2O are disclosed. The amount of H2S in the H2Se-containing gas is reduced below 10 ppmv by passing the H2Se-containing gas through an AW-500 molecular sieve. H2S and H2O are removed by passing H2Se through a 4 A molecular sieve and subsequently passing H2Se through an AW-500 molecular sieve.Type: GrantFiled: May 27, 2011Date of Patent: January 29, 2013Assignees: Air Liquide Electronics U.S. LP, American Air Liquide, Inc.Inventors: Nathan Stafford, Richard J. Udischas