Patents Assigned to ALATECH SEMICONDUCTOR
  • Device and method for inspecting moving semiconductor wafers
    Patent number: 8817249
    Abstract: Device for inspecting defects in semiconductor wafers, comprising a member for detecting surface defects using variations in the slope of a surface of the wafer, a member for detecting surface defects using variations in the light intensity reflected by a surface of the wafer, at a plurality of points, a member for detecting light intensity scattered by the surface of the wafer, a light source, and a detecting and classifying mechanism connected upstream of said detecting members.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: August 26, 2014
    Assignee: Alatech Semiconductor
    Inventors: Philippe Gastaldo, Frederic Pernot, Olivier Piffard
  • DEVICE AND METHOD FOR INSPECTING MOVING SEMICONDUTOR WAFERS
    Publication number: 20130044316
    Abstract: Device for inspecting defects in semiconductor wafers, comprising a member for detecting surface defects using variations in the slope of a surface of the wafer, a member for detecting surface defects using variations in the light intensity reflected by a surface of the wafer, at a plurality of points, a member for detecting light intensity scattered by the surface of the wafer, a light source, and a detecting and classifying mechanism connected upstream of said detecting members.
    Type: Application
    Filed: May 4, 2011
    Publication date: February 21, 2013
    Applicant: ALATECH SEMICONDUCTOR
    Inventors: Philippe Gastaldo, Frederic Pernot, Olivier Piffard