Abstract: Process and apparatus for the characterization of an insulator (5) at breakdown with the aid of an electron microscope (1), in which the electron flow rate of the beam (3) is adjusted as a function of in particular backscattered, lost, secondary or absorbed electrons. An automatic controller (9) sensitive to certain sensors (10,12) is provided for this purpose. The electron flow rate is proportional to the voltage to be simulated in the insulator.
Type:
Grant
Filed:
June 18, 1996
Date of Patent:
June 3, 1997
Assignees:
A L'Energie Atomique, Alcatel Cables
Inventors:
Claude Le Gressus, Claude Faure, Daniel Acroute, Jose Bezille, Hakim Janah, Gerard Moya, Guy Blaise