Patents Assigned to Alcedo, Inc.
  • Capacitor charging sensor
    Patent number: 6144037
    Abstract: A system for detecting charge accumulation during semiconductor wafer manufacturing including a sensor comprising a capacitor, an emitter for directing a primary electron beam toward the sensor, wherein the primary electron beam causes the sensor to emit secondary electrons and a detector for measuring the secondary electrons.
    Type: Grant
    Filed: June 18, 1998
    Date of Patent: November 7, 2000
    Assignees: International Business Machines Corporation, Alcedo, Inc.
    Inventors: James G. Ryan, Badih El-Kareh, Auguste B. El-Kareh