Abstract: Continuous spatial atomic layer deposition is performed on a particulate substrate in a continuous reactor comprising a plurality of spatially separated, precursor dosing zones and a means for moving the particulate substrate spatially through the precursor dosing zones to apply an atomic layer deposition coating thereon. The precursor dosing zones may be used simultaneously.
Type:
Grant
Filed:
June 14, 2016
Date of Patent:
October 3, 2023
Assignee:
ALD NANOSOLUTIONS, INC.
Inventors:
Joseph Allen Spencer, II, Robert A Hall
Abstract: A piezoelectric element holder allows a piezoelectric crystal to be mounted with a single exposed surface. This permits more accurate estimates of applied coating weights and thicknesses to be obtained. The piezoelectric element is mounted via a removable cap and malleable seal that permit the element to be removed and replaced easily.