Abstract: A spectral confocal measurement device includes a light source portion, configured to emit a broad-spectrum light beam with a certain wavelength range in a first predetermined path; an optical sampling portion, configured to converge the broad-spectrum light beam emitted from the light source portion on different measurement surfaces of an object to be measured, and output a reflected light in a second predetermined path that is different from a reverse direction of the first predetermined path; and a measurement portion, configured to receive and process the reflected light from the optical sampling portion to obtain a measurement result. The device can improve measurement accuracy and reduce production costs. In addition, a spectral confocal measurement method is also provided.

Abstract: Disclosed are a method, a device and a system for improving system accuracy of an X-Y motion platform, and the method includes: taking a picture of a preset calibration board synchronously as a controlled equipment on an X-Y motion platform moves, and analyzing the picture to obtain pixel coordinates of a calibration point in the picture, where the preset calibration board is taken as a reference; acquiring actual coordinates of the calibration point on the calibration board, and calculating actual position coordinates of the controlled equipment on the X-Y motion platform from the actual coordinates and the pixel coordinates of the calibration point; and adjusting a motion control system of the X-Y motion platform according to the actual position coordinates, to control the motion of the X-Y motion platform to perform motion compensation for the controlled equipment.