Abstract: An electrostatic chuck can be manufactured at low cost and can securely prevent arcing even if the main body of the electrostatic chuck is thin. This electrostatic chuck is provided with an electrostatic chuck main body, an arcing prevention member, and a metal base member. The electrostatic chuck main body and the metal base member are provided with a plurality of vertical cooling gas holes. The arcing prevention member includes: a ceramic plate-shaped body through which a plurality of fine holes 20-100 ?m in diameter pass; and an exterior member that secures the ceramic plate-shaped body and is disposed in an upper part of the vertical cooling gas holes. The ceramic plate-shaped body is thicker than the electrostatic chuck main body.