Patents Assigned to ALLIED INTEGRATED PATTERNING CORP.
  • Publication number: 20080182179
    Abstract: A gray tone mask includes a transparent substrate and a light blocking layer. The light blocking layer is disposed on the transparent substrate and has a transparent region with a minimum thickness, an opaque region with a maximum thickness and a gray tone region with an intermediate thickness, wherein the intermediate thickness is between the minimum thickness and the maximum thickness, and the optical transmissivity of the gray tone region is approximately between 5% and 95%.
    Type: Application
    Filed: January 25, 2007
    Publication date: July 31, 2008
    Applicant: ALLIED INTEGRATED PATTERNING CORP.
    Inventor: Robert Chin Fu TSAI