Patents Assigned to Almotechnos Co., Ltd.
  • Patent number: 6364621
    Abstract: There is disclosed a controlling apparatus for controlling at least one vacuum pump and comprising: at least one vacuum pump having a pump body for sucking a gaseous body from a clean room and exhausting the clean room or the gaseous body and a driving motor for driving the pump body; and a controlling section for controlling the driving motor. The controlling apparatus includes a power measurement device, which measures a driving power to be sent to the driving motor. If the power measurement device measures power which reaches or exceeds a warning value, above a fixed value, then the controlling section switches the state of the at least one vacuum pump from a steady operational state into an unusual event checking state, during which an inspection of the vacuum pump is carried out.
    Type: Grant
    Filed: May 1, 2000
    Date of Patent: April 2, 2002
    Assignee: Almotechnos Co., Ltd.
    Inventor: Kazuhiko Yamauchi