Abstract: Disclosed are Si-containing thin film forming precursors, methods of synthesizing the same, and methods of using the same to deposit silicon-containing films using vapor deposition processes for manufacturing semiconductors, photovoltaics, LCD-TFT, flat panel-type devices, refractory materials, or aeronautics.

Abstract: Purified SiHCl3 and/or SiCl4 are used as a sweep gas across a permeate side of a gas separation membrane receiving effluent gas from a polysilicon reactor. The combined sweep gas and permeate is recycled to the reactor.

Abstract: A novel power generation system, more specifically an integrated power generation and air separation system and an integrated power generation and air separation process is provided. A key component of the system and process is an oxygen-fired combustor designed for gas turbine operating pressures. The combustor produces a high-temperature gas stream that enters one or more heat exchangers to generate/heat steam, and then enters one or more turbines to generate power. The steam from the heat exchanger drives one or more steam turbines to generate power, and the discharged steam is admitted to the combustor. To maximize cycle efficiency, steam extraction and reheat is incorporated in the process. Additional power is generated from a high-pressure nitrogen stream produced by an air separation unit (ASU). This process has the potential to attain high cycle efficiencies with zero emissions, while utilizing existing or near-term steam turbines, and moderate-pressure combustion systems.

Abstract: An integrated air separation and power generation process produces an O2-enriched gas stream and an N2-enriched gas stream in an air separation unit. The O2-enriched gas stream is introduced with fuel and steam to a combustor, producing flue gas. At least a portion of the flue gas and steam stream exiting the combustor is used to generate power. The N2-enriched gas stream is heated and power is generated from the heated N2-enriched gas stream.