Abstract: Provided herein are nanostructures for lithium ion battery electrodes and methods of fabrication. In some embodiments, a nanostructure template coated with a silicon-based coating is provided. The silicon coating may include a non-conformal, more porous silicon-rich SiEx layer and a conformal, denser SiEx layer on the non-conformal, more porous layer. In some embodiments, two different deposition processes are used: a PECVD layer to deposit the non-conformal, silicon-rich SiEx layer and a thermal CVD process to deposit the conformal layer. The silicon-rich SiEx material prevents silicon crystalline domain growth, limits macroscopic swelling, increases lithium diffusion rate and enhances significantly battery life during lithium ion battery cycle of charge and discharge.

Abstract: Apparatuses and methods for depositing materials on both sides of a web while it passes a substantially vertical direction are provided. In particular embodiments, a web does not contact any hardware components during the deposition. A web may be supported before and after the deposition chamber but not inside the deposition chamber. At such support points, the web may be exposed to different conditions (e.g., temperature) than during the deposition. Also provided are substrates having materials deposited on both sides that may be fabricated by the methods and apparatuses.