Abstract: An integrated photonics optical gyroscope fabricated on a silicon nitride (SiN) waveguide platform comprises a first straight waveguide to receive incoming light and to output outgoing light to be coupled to a photodetector to provide an optical signal for rotational sensing. The gyroscope comprises a first microresonator ring proximate to the first straight waveguide. Light evanescently couples from the first straight waveguide to the first microresonator ring and experiences propagation loss while circulating as a guided beam within the first microresonator ring. The guided beam evanescently couples back from the first microresonator ring to the first straight waveguide to provide the optical signal for rotational sensing after optical gain is imparted to guided beam to counter the propagation loss. In a coupled-ring configurations, the first microresonator ring acts as a loss ring, and optical gain is imparted to a second microresonator ring which acts as a gain ring.

Abstract: Aspects of the present disclosure are directed to structural modifications introduced in a waveguide structure in order to more tightly pack adjacent waveguide turns in an optical gyroscope fabricated on a planar silicon platform as a photonic integrated circuit. Increasing number of turns of the gyroscope coil increases total waveguide length as well as enclosed area of the gyroscope loop, which translates to increased sensitivity to rotational measurement.

Abstract: Aspects of the present disclosure are directed to configurations of compact ultra-low loss integrated photonics-based waveguides for optical gyroscope applications, and the methods of fabricating those waveguides for ease of large scale manufacturing. Four main process flows are described: (1) process flow based on a repeated sequence of oxide deposition and anneal; (2) chemical-mechanical polishing (CMP)-based process flow followed by wafer bonding; (3) Damascene process flow followed by oxide deposition and anneal, or wafer bonding; and (4) CMP-based process flows followed by oxide deposition. Any combination of these process flows may be adopted to meet the end goal of fabricating optical gyroscope waveguides in one or more layers on a silicon substrate using standard silicon fabrication technologies.

Abstract: An integrated photonics optical gyroscope fabricated on a silicon nitride (SiN) waveguide platform comprises a first straight waveguide to receive incoming light and to output outgoing light to be coupled to a photodetector to provide an optical signal for rotational sensing. The gyroscope comprises a first microresonator ring proximate to the first straight waveguide. Light evanescently couples from the first straight waveguide to the first microresonator ring and experiences propagation loss while circulating as a guided beam within the first microresonator ring. The guided beam evanescently couples back from the first microresonator ring to the first straight waveguide to provide the optical signal for rotational sensing after optical gain is imparted to guided beam to counter the propagation loss. In a coupled-ring configurations, the first microresonator ring acts as a loss ring, and optical gain is imparted to a second microresonator ring which acts as a gain ring.

Abstract: The present disclosure relates to system-level integration of lasers, electronics, integrated photonics-based optical components and a sensing chip. Novel waveguide design on the integrated photonics chip, acting as a front-end chip, ensures precise detection of phase change in a fiber coil or a sensing chip having a waveguide coil or ring resonator, where the sending chip is coupled to the front end chip. Strip waveguides are designed to primarily select TE mode over TM mode when laser light is coupled into the integrated photonics chip. A plurality of mode-selective filters, based on multi-mode interference (MMI) filter, a serpentine structure, or other types of waveguide-based mode-selective structure, are introduced in the system architecture. Additionally, implant regions are introduced around the waveguides and other optical components to block unwanted/stray light into the waveguides and optical signal leaking out of the waveguide.