Abstract: A method is described that involves measuring a first set of interferometer fringe line disturbances against pre-determined measurement scale information in order to generate a first set of profiles that describe the topography of a sample that is placed upon a sample stage associated with the interferometer. The first set of profiles map to traces that run over a first axis of the sample and the sample stage. The traces have a recognized spacing between one another along a second axis of the sample and the sample stage. The method also involves adjusting the relative position of the traces to the sample so as to create a second set of fringe line disturbances. The method also involves measuring, the second set of interferometer fringe line disturbances against the pre-determined measurement scale information in order to generate a second set of profiles that describe the topography of the sample.

Abstract: A method is described that involves tracking a fringe line disturbance that has breached its field of reference. The method also involves translating each pixel location of the tracked fringe line disturbance to an x,y,zs data point. x and y represent a position on the plane of an interferometer's sample stage. zs represents the height of a sample above the x,y position. The sample is placed upon the sample stage of an inteferometer so as to create the fringe line disturbance. The fringe line disturbance is observed on the interferometer's detector.