Patents Assigned to Annealsys
  • METHOD FOR PRODUCING LITHIUM-BASED LAYERS BY CVD
    Publication number: 20130260024
    Abstract: A method for forming by CVD a lithium-based layer, according to which the lithium precursor is in liquid form in a mixture containing a solvent and a Lewis base.
    Type: Application
    Filed: May 15, 2013
    Publication date: October 3, 2013
    Applicants: Annealsys, Commissariat A L'Energie Atomique Et Aux Energie Alternatives
    Inventors: Lucie JODIN, Philipp ACHATZ, Jean-Manuel DECAMS, Jean-Luc DESCHANVRES, Maria del Carmen JIMENEZ AREVALO, Sylvain POULET