Abstract: A linear motor system includes a coil assembly, a movable magnet assembly, and a bearing assembly coupled to facilitate movement of one of the magnet assembly and the coil assembly with respect to the other. The bearing assembly includes a single bearing rail, wherein the single bearing rail is a separate component from the coil assembly and the magnet assembly and is mounted to the magnet assembly on a major face thereof opposite the major face thereof adjacent to which the coil assembly is disposed. The single bearing rail is narrower than the coil assembly and the magnet assembly. The single bearing rail includes a profiled rail configured to hold the magnet assembly on the coil assembly while allowing the magnet assembly to move along the coil assembly.

Abstract: A linear motor system includes a coil assembly and a magnet assembly disposed adjacent to the coil assembly. The coil assembly includes a plurality of coil windings and a sealing material to seal and to prevent moisture and/or chemical ingress into the coil windings. The magnet assembly includes a plurality of magnets, a magnet housing disposed to house, cover and seal the plurality of magnets within the magnet housing, a plate to cover the plurality of magnets, a sealing element disposed between the plate and the magnet housing to seal the magnet assembly, and a groove formed to receive the sealing element between the plate and the magnet housing.

Abstract: A linear motor system is provided includes a coil assembly, a magnet assembly, and a bearing assembly disposed between the coil and magnet assemblies to allow movement of one or both of them. The bearing assembly includes a single bearing rail that can be mounted on either side of the magnet assembly. The rail has elongated recesses that receive bearing elements. A stage structure may be attached to the assembly, such at to the magnet assembly, to move a machine component along the rail.

Abstract: A sealed linear motor system is provided. The sealed linear motor system includes a sealed coil assembly having a plurality of coil windings within a base plate and comprising covers disposed about the base plate and coil windings to prevent moisture and/or chemical ingress into the base plate and the coil windings. The sealed linear motor system also includes a sealed magnet assembly disposed adjacent to the coil assembly and comprising a plurality of magnets mounted on a magnet mounting plate and a magnet housing disposed on a surface of the magnet mounting plate to cover and seal the plurality of magnets within the housing.

Abstract: The innovation relates to systems and methodologies for facilitating and/or enhancing heat transfer in a stage machine employed in an industrial or manufacturing environment. A thermal block and thermal rail combination and/or a thermal block and bearing rail combination draw accumulated heat away from a source of heat generated within the stage machine, and such combinations conduct the heat to a base of the stage machine. Each type of combination is conductively coupled such that the conductive coupling facilitates the translation or movement of the stage while maintaining contact to facilitate the conduction through the thermal block and thermal rail of the stage machine. The removal of the heat from the source of the heat or the accumulation of the heat within the stage machine system prevents distortion of the machine or products being manufactured or measured by the machine from the heat.

Abstract: The innovation relates to systems and methodologies for facilitating and/or enhancing heat transfer in a stage machine employed in an industrial or manufacturing environment. A thermal block and thermal rail combination and/or a thermal block and bearing rail combination draw accumulated heat away from a source of heat generated within the stage machine, and such combinations conduct the heat to a base of the stage machine. Each type of combination is conductively coupled such that the conductive coupling facilitates the translation or movement of the stage while maintaining contact to facilitate the conduction through the thermal block and thermal rail of the stage machine. The removal of the heat from the source of the heat or the accumulation of the heat within the stage machine system prevents distortion of the machine or products being manufactured or measured by the machine from the heat.

Abstract: Systems and methods of providing support to a mirror assembly including a high-stiffness, low mass structure. An L-shaped support, in conjunction with a shelf member and a plurality of fingers, provides support to a chuck upon which an operation (such as a wafer inspection) can be carried out. Materials such as ALBEMET and INVAR can be used to reduce mass and increase stiffness to avoid resonance in the system. Sensors and actuators can be employed to sense input energy and adjust the structure, respectively, if resonance is deemed likely.

Abstract: A path module for a linear motor system includes a controller coupled to one or more amplifiers that are operative to control associated windings in the module. The controller receives control information via a communications link. The controller controls the amplifier based on the received control information so as to selectively energize the associated windings in the module. In one aspect, a plurality of such modules may be connected together to form a path along which one or more stages are moveable according to energization of the windings in the path.

Abstract: A system and method for mounting the strip seal on the side of a pass-through positioning stage. The strip seal can effectively provide support to a cover of the stage and be magnetically coupled to the cover and base for an enhanced seal and added support. Accordingly, the tendency for the stage to sag and vibrate during operation is mitigated. Moreover, a side-mounted strip seal is exposed to a reduced amount of debris that accumulates on the top of a stag, and thus is less susceptible to contaminants entering the interior of the stage. As such, and in connection with a variety of other means for reducing contamination, the stage can operate for longer periods of time without wear and/or maintenance, etc.

Abstract: A magnet assembly includes a back iron and an array of magnets. The back iron is in the form of a plate having opposed surfaces. The magnets are arranged along one of the surfaces, with the other surface being dimensioned and configured according to the magnetic field distribution associated with the magnets. The back iron geometry provides for reduced mass, reduced leakage flux, and high flux densities to improve performance of a linear motor that employs such a magnet assembly.

Abstract: A magnet assembly includes a back iron and an array of magnets. The back iron is in the form of a plate having opposed surfaces. The magnets are arranged along one of the surfaces, with the other surface being dimensioned and configured according to the magnetic field distribution associated with the magnets. The back iron geometry provides for reduced mass, reduced leakage flux, and high flux densities to improve performance of a linear motor that employs such a magnet assembly. Additionally, the back iron can be a magnetically conductive annular ring, such as is employed in a rotary motor. Moreover, the magnets can be arranged in a manner that generates a Halbach array to increase force output in a desired direction while canceling stray magnetic fields in other directions. Similar reduced-mass designs can be employed in conjunction with a back iron of a fixed cross-section and magnets of variable thicknesses, variable lengths, and/or variable widths.

Abstract: A system that facilitates damping of mechanical vibration associated with machinery that is subject to such mechanical vibration. The system comprises machinery with at least one moveable part and a piezoelectric actuator that is selectively applied to the machinery. The piezoelectric actuator receives voltages and is employed to facilitate damping of mechanical vibration associated with the machinery.

Abstract: Systems and methods of providing support to a mirror assembly including a high-stiffness, low mass structure. An L-shaped support, in conjunction with a shelf member and a plurality of fingers, provides support to a chuck upon which an operation (such as a wafer inspection) can be carried out. Materials such as ALBEMET and INVAR can be used to reduce mass and increase stiffness to avoid resonance in the system. Sensors and actuators can be employed to sense input energy and adjust the structure, respectively, if resonance is deemed likely.

Abstract: Systems and methods of positioning a tool using a linear motor with a plurality of stages on a single path. A single rail and a plurality of trucks containing stages can comprise a linear motor. The trucks can connect to a tool through a linkage such as a four bar linkage or a scissor jack. The global position of the stages can be manipulated to effectuate motion along the path; the relative position, velocity, and acceleration of the trucks can be manipulated to effectuate motion in another direction such as a direction perpendicular to the path.

Abstract: A rotary-linear system is configured to operate an associated tool. The system includes a rotary-linear actuator having first and second portions that can move linearly and/or rotationally relative to each other, such as about a central axis extending through the actuator. An elongated drive rod extends axially through at least a portion of the actuator, which is operative to rotate about a longitudinal axis thereof generally independently of the actuator. While the rotation of the drive rod can be independent of movement of the actuator, such rotation can be controlled based on the position and/or movement of the actuator. An end of the drive rod near a distal end of the actuator is operative to actuate an associated tool, such as can be mounted at a distal end of the actuator.

Abstract: A wireless encoder system facilitates operation and control of a motor, such as linear motor. The system includes an encoder sensor moveable with a first part of the motor. The encoder sensor is operative to sense movement of the first part relative the second part and provide an encoder signal having an electrical characteristic indicative of the sensed movement. A transmitter, which is associated with the encoder sensor, is operative to transmit a wireless transmitter signal based on the encoder signal. A remote receiver that receives the wireless transmitter signal thus may determine position and/or movement of the first part of the motor relative to a second part of the motor.

Abstract: A system, method and apparatus for controlling a linear stage a pallet is described herein. In one aspect, a conveyor system includes a conveyor pallet that includes a first mobile magnetic component and a second mobile magnetic component. A first stationary magnetic component can magnetically engage the first mobile magnetic component. A second stationary magnetic component can magnetically engage the second mobile magnetic component. A first controller can activate a first magnetic displacement between the first stationary magnetic component and the first mobile magnetic component when the conveyor pallet is in a first range of positions. A second controller can activate a second magnetic displacement between the second stationary magnetic component and the second mobile magnetic component when the conveyor pallet is in a second range of positions.

Abstract: A magnet assembly includes a back iron and an array of magnets. The back iron is in the form of a plate having opposed surfaces. The magnets are arranged along one of the surfaces, with the other surface being dimensioned and configured according to the magnetic field distribution associated with the magnets. The back iron geometry provides for reduced mass, reduced leakage flux, and high flux densities to improve performance of a linear motor that employs such a magnet assembly.

Abstract: A system that facilitates damping of mechanical vibration associated with machinery that is subject to such mechanical vibration. The system comprises machinery with at least one moveable part and a piezoelectric actuator that is selectively applied to the machinery. The piezoelectric actuator receives voltages and is employed to facilitate damping of mechanical vibration associated with the machinery.