Abstract: Disclosed is a tin-based electroplating solution for forming solder bumps of a flip chip package. The tin-based electroplating solution includes tin methanesulfonate, silver methanesulfonate, methanesulfonic acid, a fluorinated surfactant, an aromatic polyoxyalkylene ether, and water. Also disclosed is a method for forming solder bumps by using the electroplating solution. The method includes (1) electroplating a silicon wafer having a protective layer through which an electrode pad is exposed and an under bump metallurgy (UBM) layer with a copper or copper/nickel plating solution to form copper or copper/nickel pillars on the under bump metallurgy layer and (2) electroplating the pillars with the tin-based electroplating solution to form solder bumps.
Type:
Grant
Filed:
July 27, 2015
Date of Patent:
January 16, 2018
Assignee:
APCT CO., LTD
Inventors:
Jung Woo Ko, Jeong Hun Oh, Kyu Bin Park, Hyun Kook Park, Heung Su Jung