Patents Assigned to APOLLO PRECISION BEIJING LIMITED
  • Magnetron with gradually increasing magnetic field out of turnarounds
    Patent number: 9218945
    Abstract: A magnetron include a center plurality of magnets and an outer plurality of magnets arranged around the center plurality of magnets in a shape of two long sections and two shorter turnaround sections. The outer plurality of magnets are configured with at least one region of weaker magnetic field strength in at least one of the two long sections and adjacent to one of the two turnaround sections.
    Type: Grant
    Filed: December 12, 2011
    Date of Patent: December 22, 2015
    Assignee: APOLLO PRECISION BEIJING LIMITED
    Inventors: Fred Chetcuti, Edward J. McInerney
  • Filter circuit for a magnetron deposition source
    Patent number: 9103026
    Abstract: A magnetron sputtering system comprising a vacuum processing chamber having a chamber shield, a magnetron assembly, and a substrate, the magnetron assembly comprising a permanent magnetic assembly and an electromagnetic coil assembly, a first impedance circuit coupled between a power supply and the electromagnetic coil assembly, the first impedance circuit comprising a first resistor and a first capacitor, and a second impedance circuit having a second resistor and a second capacitor, and coupled between the substrate and a susceptor.
    Type: Grant
    Filed: October 20, 2011
    Date of Patent: August 11, 2015
    Assignee: APOLLO PRECISION BEIJING LIMITED
    Inventors: Randy Dorn, Jason Cheng, Hyung Paek