Abstract: A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.
Type:
Grant
Filed:
November 19, 2012
Date of Patent:
August 2, 2016
Assignees:
UNIVERSITAT DE BARCELONA, NANOMEGAS SPRL, APPFIVE LLC
Inventors:
Sonia Estrade Albiol, Joaquin Portillo Serra, Francisca Peiró Martinez, José Manuel Rebled Corsellas, Lluís Yedra Cardona, Stavros Nicolopoulos, Steven Kim, Jon Karl Weiss
Abstract: A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.
Type:
Application
Filed:
November 19, 2012
Publication date:
September 19, 2013
Applicants:
Universitat de Barcelona, AppFive LLC, Nanomegas SPRL
Inventors:
Sonia Estrade Albiol, Joaquin Portillo Serra, Francisca Peiro Martinez, José Manuel Rebled Corsellas, Lluis Yedra Cardona, Stavros Nicolopoulos, Steven Kim, Jon Karl Weiss