Patents Assigned to Applied Amterials, Inc.
  • Patent number: 7505647
    Abstract: Methods and structures are disclosed demultiplexing optical signals transmitted over an optical fiber into a silicon substrate and to multiple detectors. The silicon substrate has two spaced-apart surfaces and a diffractive element disposed adjacent to one of the surfaces. Each of the optical signals corresponds to one of multiple wavelengths. The optical signals are directed into the silicon substrate along a path through the first surface to be incident on the diffractive element. The path is oriented generally normal with the first surface and/or with the diffractive element, which angularly separates the optical signals such that each of the wavelengths traverses through the substrate in a wavelength dependent direction to the first surface. Each optical signal is steered from the first surface towards the second surface to be incident on different optical elements that direct them generally normal to the first surface to be incident on one of the detectors.
    Type: Grant
    Filed: June 29, 2007
    Date of Patent: March 17, 2009
    Assignee: Applied Amterials, Inc.
    Inventors: Andreas Goebel, Lawrence C. West, Gregory L. Wojcik