Abstract: A method of correcting physically conditioned errors in the measurement of an object detects an image of the object to be measured, measures the imaged object, determines a measurement error caused by structural surroundings of the object, and corrects the measurement result in dependence on the measurement error.
Type:
Grant
Filed:
July 11, 2000
Date of Patent:
September 21, 2004
Assignee:
Applied Integrated Systems & Software
Inventors:
Hans Hartmann, Thomas Waas, Hans Eisenmann, Hans-Juergen Brueck
Abstract: A method for generating information for producing a pattern, defined by design information on a medium, using at least one direct-writing pattern generating process, which first provides the design information and then calculates correction data based on the provided design information and depending on the pattern generating process which corrects pattern faults in the pattern to be generated which were caused by the pattern generating process. The design and correction information is then separately provided to the direct-writing pattern generating process for its activation.