Patents Assigned to Applied Materials, LLC
  • Bi-directional association and graphical acquisition of time-based equipment sensor data and material-based metrology statistical process control data
    Patent number: 9915940
    Abstract: A method and system for linking sensor data to metrology data and metrology data to sensor data is described herein. In one embodiment, a user selection of metrology data for a product is received, related process tool fault detection summary for the selected metrology data for the product is presented, a user selection of a process tool from the process tool fault detection summary is received, and related fault detection details for the selected process tool are presented.
    Type: Grant
    Filed: October 30, 2012
    Date of Patent: March 13, 2018
    Assignee: Applied Materials, LLC
    Inventors: Brad Schulze, Joseph Dox