Abstract: The invention provides a device for sputtering comprising a main magnet, two secondary magnets mounted on two sides of the main magnet symmetrically, and a shell. The two secondary magnets face to each other in ends with the same polarity in a line. The shell is cylindrical and contains the main magnet and the secondary magnets.
Abstract: An alarm device for feedthrough assembly is proposed. The device comprises a body having a chamber, a sealing module configured on a first surface of the body for connecting to a feedthrough assembly, wherein a first surface has a hole across the chamber, and an alarm assembly configured in the chamber. In addition, if a shaft seal of the feedthrough assembly is failure, a pressure difference produced between the chamber and inner shaft seal forces the alarm assembly to move toward the feedthrough assembly.