Patents Assigned to Applied Optics Center of Delaware, Inc.
  • Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films
    Patent number: 6731380
    Abstract: A beam deflection technique for simultaneous measurements of the thickness, refractive index and optical absorption of transparent materials using a charge coupled device (CCD) camera is provided. The method comprises measuring beam deflection after transmission through or reflection off a sample of interest at variable incidence angles to the sample surface. The measurement of beam deflection as a function of incident angle is related through Snell's Law directly to the sample thickness and sample index of refraction.
    Type: Grant
    Filed: June 18, 2001
    Date of Patent: May 4, 2004
    Assignee: Applied Optics Center of Delaware, Inc.
    Inventors: Mohamed Kamel Amara, Noureddine Melikechi, Sabbir M. Mian