Patents Assigned to Applied Photonics Research
  • Double-sided radiation-assisted processing apparatus
    Patent number: 5083030
    Abstract: A double-sided radiation-assisted processing apparatus includes a planar radiation source having first and second sides and providing radiation having an intensity I.sub.O at the surface of substrates provided on both the first and second sides of the radiation source. Accordingly, the radiation intensity utilized for processing is 2I.sub.O.
    Type: Grant
    Filed: March 12, 1991
    Date of Patent: January 21, 1992
    Assignee: Applied Photonics Research
    Inventor: Vladimir Stavov